DEVELOPMENT OF GRAZING-EXIT MICRO X-RAY FLUORESCENCE INSTRUMENT AND SINGLE PARTICLE ANALYSIS SUCH AS AEROSOLS

我们研究了放牧退出条件下的EPMA，称为GE-EPMA。我们在商用EPMA的基础上开发了GE-EPMA装置。我们评估了GE-EPMA的分析表征。在极低的背景下，GE-EPMA可以进行图像分析和单粒子分析。通过分析EPMA强度与出口角的关系，可以对薄膜的厚度和密度进行评价。GE-EPMA的优点是使用直径较小的电子束，入射角度为90度，这使得进行局部分析成为可能。可以通过扫描电子束或样品台来绘制元素图。此外，可以通过改变出口角度进行深度分析，最终得到三维EPMA

We have studied EPMA under grazing-exit conditions, which is called GE-EPMA. We developed a GE-EPMA apparatus based on a commericial EPMA. We evaluated the analytical characterization of GE-EPMA. It was foue analysis and single-particle analysis are possible by GE-EPMA with extremely low background. By analyzing exit-angle dependence of EPMA intensity, we can evaluate thickness and density of him films. The advantage of GE-EPMA is the use of an electron beam with a small diameter at an incident angle of 90 degrees, which makes it possible to perform localized analysis. Element mapping is possible by scanning the electron beam or the sample stage. In addition, depth analysis is possible by varying the exit angle, which could finally result in 3-dimensional EPMA