SYNTHESIS OF HEAT RESISTANT, TRANSPARENT POLYARYLATE AND APPLICATION TO WAVEGUIDE TYPE DEVICES

新合成了玻璃化转变温度（Tg）超过200℃的耐热聚芳酯。研究了一系列聚芳酯的光学性能和热稳定性。结果表明，该聚酰亚酯具有较高的热稳定性，在可见光和近红外区具有较高的光学透明度。其中一种聚芳酯具有很高的热稳定性和低双折射性，足以用于光学器件的制造。利用电子束刻写技术和热显影技术制备了高分辨率的聚芳酯浮雕光栅。氟化聚芳酸酯对电子束的灵敏度比其他聚芳酸酯高20倍。利用具有较高透明度的氟化聚芳酸盐，通过光刻和反应离子刻蚀技术制备了芯尺寸为30μm和90μm的多模波导。由于其优异的特性足以用于光波导的制造，聚芳酸盐薄膜将成为光子器件应用的有希望的候选者，特别是在光互连和光局域网方面。

Heat resistant polyarylates with high glass transition temperature (Tg) over 200℃ were newly synthesized. Optical properties and thermal stability were investigated with a series of polyarylates. It indicated that the Ppolyarylates showed high thermal stability as well as high optical transparency in visible and near IR region. Especially one of polyarylates showed very high thermal stability and low birefringence sufficient for optical device fabrication. EB lithography could be applied to the PAR thin films, and high resolution relief gratings on polyarylate were fabricated by direct electron beam writing technique together with thermal development. It was also found that a fluorinated polyarylate showed higher sensitivity for electron beam by 20 times than other polyarylates. Using the fluorinated polyarylate, which reviels higher transparency, multi-mode waveguides with core sizes of 30μm and 90μm were also fabricated by photoithography and reactive ion etching techniques. From their excellent characteristics sufficient for optical waveguide fabrication, the polyarylate films will be promising candidate for photonic device applications, especially for optical interconnection and for optical local area network.