Development of a novel micro-column using the multi-gated field emitter for SEM application

我们开发了一种用于扫描电子显微镜(SEM)的新型微柱，该微柱采用多栅场发射极。设计制作了微柱，并对微柱的电子束特性进行了测试。我们成功地研制出了我们所设计的新型微柱。然而，对于扫描电子显微镜的应用，微柱发射的束流大小仍然不够。减小微柱的初始光束角是必要的。我们考虑在微柱中加入焊条电极，并考察了焊条电极的作用效果。结果表明，通过在微柱中加入焊条电极，可以实现用于扫描电子显微镜的多栅场发射微柱。

We have developed a novel micro-column using the multi-gated field emitter for scanning electron microscope (SEM) application. We designed and fabricated the micro-column, and measured the electron beam characteristics of the micro-column. We have successfully developed the novel micro-column as we designed. However, for the SEM application, the beam size emitted from the micro-column is still not sufficient. Reducing the initial beam angle from the micro-column is necessary. We considered to incorporate a welt electrode with the micro-column, and investigated the effect of the welt electrode. As a result, we have concluded that we can realize a multi-gated field emitter micro-column for SEM application by incorporating a welt electrode with the micro-column.