Study of Ion Beam Machining of Single Point Diamond Tools for Ultra-Precision Turning

为了研究由氩离子形成或磨尖的金刚石工具与待加工基体之间粘附的原因，我们用RHEED检测了不同条件下氩离子和氢等离子体加工金刚石的结晶度，并用赫兹压痕检测了加工后金刚石的微强度。此外，为了评估0.2和1.0 keV氩离子抛光金刚石刀的切割性能，使用切片机将加工好的金刚石刀切割成封闭在环氧区的小鼠肝脏。此外，还开发了一种预测金刚石刀具轮廓变化和面角（负地角）的计算机模拟方法。结果表明：(1)在800 ~ 850℃的氢等离子体温度下，1.0键氩离子加工后的金刚石试样损伤层可以去除。(2)在400 ~ 800℃的温度下用氩离子加工的金刚石样品结晶度好。(3)用1.0键氩离子加工的金刚石试样经氢等离子体处理后，显微强度得到提高。(4)用金刚石刀用0.2和1.0 keV的氩离子磨光，切片机可以得到环氧树脂包裹的小鼠肝脏的精细切片。(5)计算机模拟方法可用于预测单点金刚石刀具和金刚石刀具等半圆柱形物体的轮廓变化和切面角度。(6)单点金刚石刀具在将金刚石切屑贴合到刀柄上时，由于被加工的金刚石刀具表面受到污染，无法获得铝质基材的精细表面。

In order to investigate reasons for the adhesion between diamond tools formed or sharpened with Ar ions and substrates to be turned, we have examined the crystallinity of diamond machined with argon ions and hydrogen plasma under various conditions by RHEED and microstrength of the processed diamond by Hertz indentation. Also, in order to evaluate the cutting performance of diamond knives finished with argon ions of 0.2 and 1.0 keV, a piece of Mouse liver enclosed within epoxy regions was cut with the processed diamond knives using a microtome. Moreover, a computer simulation method has been developed for predictions the profile changes and facets angle (angle of the negative land) of diamond tools. The conclusions are summarized as follows:(1) The damaged layer of the diamond specimen machined with argon ions of 1.0 key can be removed by the processing with hydrogen plasma at 800 - 850 ﾟC. (2) The diamond specimens machined with argon ions at 400 - 800 ﾟC have good crystallinity. (3) Microstrength of the diamond specimen machined with argon iong of 1.0 key is increased by the processing with hydrogen plasma. (4) Fine cut sections of mouse liver enclosed within epoxy resins can be obtained using a microtome with diamond knives sharpened by argon ions of 0.2 and 1.0 keV. (5) The computer simulation method is useful for the prediction of profile changes and facets angle of hemicylindrical object such as single point diamonnd diamond tools and diamond knives. (6) Fine surface of aluminum substrates can be not obtained with the processed single point diamond tools due to the surface contamination of the processed diamond tools during the fitting the diamond chip to a shank.