Study on Ion Beam Machining of Diamond Knives for Ultra-Microtomes

超薄切片机金刚石刀离子束加工研究

• 批准号: 03650114
• 负责人: MIYAMOTO Iwao
• 金额: $ 1.28万
• 依托单位: Science University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1991
• 资助国家: 日本
• 起止时间: 1991 至 1992
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03650114/
• 关键词: Diamond Knife; Ion beam machining; Radiation Damage; Atomic force microscope; Reactive ion beam machining; Microtome; Tip radius; 損傷; ミクロト-ム; イオンビ-ム加工; 生物試料; 切刃稜丸み半径; 濡れ性

Diamond knives pre-finished by mechanical lapping can be sharpen with Ar ion beams of 1.0 kev at the normal ion incidence. however, effects of the thin radiation damage layer of the knives on cutting performance and life of the knives have not been investigated. Therefore, crystallinity of the diamond specimens bombarded with Ar ions is examined utilizing an AFM (atomic force microscope). Moreover, the tip radius of quadrangular and triangular pyramidal diamond probes sharpened with ion beams is examined because of the difficulty of measurering the cutting edge sharpness of the diamond knives. Machining characteristics and surface integrity of the diamond specimens processed with oxgen ion beams was also investigated. From the experiments, conclusion are summarized as follows :(1) Tip radius of the quadrangular and triangular pyramidal proves can be predicted with simple equations.(2) Surface integrity of the diamond specimens processed with 1.0 keV argon and oxygen ions depends on crystal faces because of the difference of the initial surface integrity and scratched parts on the diamond specimens is machined faster than the other parts.(3) Diamond specimen can be machined faster with oxygen ion beams than with argon ion beams.

机械研磨预加工的金刚石刀，在正常离子入射下，可使用1.0 kev的氩离子束进行锐化。然而，刀具薄辐射损伤层对刀具切削性能和寿命的影响尚未得到研究。因此，利用原子力显微镜（AFM）检查了氩离子轰击金刚石样品的结晶度。此外，由于金刚石刀具刃口锐度难以测量，本文还对离子束磨尖的四边形和三角形锥体金刚石探针的尖端半径进行了研究。研究了氧离子束处理金刚石试样的加工特性和表面完整性。实验结果表明：(1)四边形和三角形锥体的尖端半径可以用简单的方程来预测。(2) 1.0 keV氩氧离子处理的金刚石试样表面完整性取决于晶面，因为金刚石试样表面初始完整性和划伤部位的加工速度比其他部位快。(3)氧离子束对金刚石试样的加工速度比氩离子束快。

项目成果

Iwao Miyamoto et al.: "Ion Beam Machining of Triangular Pyramidal Probes" Proc. of the 1992 Autumn Meeting of Japan Society of Precision Engineering. 1992-10. 383-384

Iwao Miyamoto 等人：“三角锥体探针的离子束加工”Proc。

宮本 岩男 ほか: "STM用三角錐型ダイヤモンド探針のイオンビーム加工" 1992年度 精密工学会秋季大会学術講演会 講演論文集. 383-384 (1992)

Iwao Miyamoto等人：“STM用三角锥金刚石探针的离子束处理”1992年日本精密工程学会秋季会议学术会议论文集383-384（1992）。

I.Miyamoto et al.: "Ion Beam Machining Quadrangular Pyramidal Probes" Proc. of the First Meeting on The Ion Engineering Society of Japan. 1992-6. 169-172

I.Miyamoto 等人：“离子束加工四角锥体探针”Proc。

宮本 岩男: "ダイヤモンドの微細加工の現状と採来" 超精密. 2. (1992)

Iwao Miyamoto：“金刚石微加工的现状和生产”Super Precision 2。（1992）

宮本 岩男ほか: "半導体ダイヤモンドのイオンビーム加工ーピラミッド型STM用探針の作製ー" 1992年度精密工学会春季大会学術講演会講演論文集. 965-966 (1992)

Iwao Miyamoto 等人：“半导体金刚石的离子束加工 - 金字塔形 STM 探针的制造”1992 年日本精密工程学会春季会议记录，965-966 (1992)