Study on Ion Beam Machining of Diamond Tools

金刚石工具离子束加工研究

• 批准号: 60550098
• 负责人: MIYAMOTO Iwao
• 金额: $ 0.96万
• 依托单位: Science University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1985
• 资助国家: 日本
• 起止时间: 1985 至 1986
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-60550098/
• 关键词: Diamond tool; ion beam machining; tip radius; diamond knife; microtome; profile SEM; ミクロトーム

Diamond tools can be used as knives of an ultramicrotome and ophthalmic sergon's instrument, and single point diamond tools for ultraprecision turning of soft materials such as aluminum. The tools are usually made by mechanical polishing; that is, using fine diamond powder and a lap-plate of soft materials. However it is very difficult to apply this process to the polishing of diamond tools having a sharp cutting edge of tip radius of ten nm (nanometer). In this study, a new edge forming process combined mechanical lapping with ion beam machining and measurment of the tip radius of diamond tools using the profile SEM having two secondary electron detectors were discussed, and the following results are obtained.(1) The tip radius of the diamond tools can be measured using profile SEM, and the tip radius of the formed diamond tools is considered less than 20 nm.(2) The diamond knives having apex angle of 50 degrees can be formed with 20 keV Ar ions.(3) Diamond tools having sharp and straight dege and fine surface topography can be easily obtaibed by ion beam machining.

金刚石工具可用作超薄切片机和眼科sergon仪器的刀具，以及用于超精密车削软材料（如铝）的单点金刚石工具。这些工具通常由机械抛光制成，也就是说，使用细金刚石粉末和软材料的研磨板。然而，将该工艺应用于具有10 nm（纳米）尖端半径的锋利切削刃的金刚石工具的抛光是非常困难的。本文讨论了一种新的金刚石工具刃口成形工艺，即机械研磨与离子束加工相结合的刃口成形工艺，并利用带有两个二次电子探测器的扫描电镜测量了金刚石工具的刃口半径。(1)金刚石工具的尖端半径可以使用轮廓SEM测量，并且所形成的金刚石工具的尖端半径被认为小于20 nm。(2)具有50度顶角的金刚石刀可以用20keV Ar离子形成。(3)用离子束加工金刚石工具，可以容易地获得刃尖、刃直、表面形貌良好的金刚石工具。

项目成果

I.Miyamoto;K.Kawata;M.Kimura;N.Kanekama: Proc. of 10th Symp.on ISIAT '86. 497-500 (1986)

I.Miyamoto；K.Kawata；M.Kimura；N.Kanekama：Proc。

I.Miyamoto;K.Kawata;M.Kimura;N.Kanekama: Proc.of IPAT '87. (1987)

I.Miyamoto；K.Kawata；M.Kimura；N.Kanekama：Proc.of IPAT 87。

I. Miyamoto: "Ultra Fine Finishing of Diamond Tools by Ion Beam" Proc. of 4th Inter. Prec. Engg. Seminar. (1987)

I. Miyamoto：“离子束金刚石工具的超精细精加工”Proc。

I.Miyamoto: Proc.of 4th Inter,Prec.Engg.Seminar. (1987)

I.Miyamoto：第 4 届 Inter、Prec.Engg.Seminar 的 Proc.。

I.Miyamoto;K.Kawata;N.Taniguchi: ASME,PED. 22. 127-133 (1986)

I.Miyamoto；K.Kawata；N.Taniguchi：ASME、PED。