Development of an apparatus for electron beam assisted chemical machining of diamond tools

首先研制了电子束辅助化学加工装置（EBACE）。然后，研究了EBACE对金刚石的加工特性，以期将EBACE应用于超精密金刚石刀具的精加工和电子金刚石器件的精细图案描绘。去年，我们开发了用于在金刚石探针顶部制作三维轮廓的加工平台。实验结果如下：(1)利用氢气和氧气成功制备了孔、线和矩形图案。(2)用氢气制备矩形图案时，刻蚀深度与刻蚀时间成正比，刻蚀深度随热扫描速度和光束加速度电压的减小而增大。(3)从拉曼光谱分析可知，用EBACE加工的单晶金刚石片无损伤。(4)利用开发的加工阶段，成功制备了金刚石探针顶部的三维突起。此外，精细的图案被描绘成电子金刚石器件。

At first, we developed an apparatus for the electron beam assisted chemical machining (EBACE). Then, machining characteristics of diamond by the EBACE was investigated in order to apply the EBACE to finishing ultra-precision diamond tools and to delineating fine patterns into electronic diamond devices. Last year, we developed the machining stage for making the three dimensional profile on the top of a diamond probe. From the experiments, following results are obtained.(1) Hole, line and rectangular patterns were successfully fabricated by EBACE with hydrogen and oxygen gases.(2) In the case of fabrication of the rectangular pattern with hydrogen gas, the etched depths are proportional to the etching time also the etched depth increases with a decrease of the heam scan speed and acceleration voltage of beam.(3) From Raman spectroscopy, it is conclude that the single crystal diamond chip machined with EBACE has no damage.(4) The three dimensional protrusion on the top of a diamond probe was successfully fabricated utilizing the developed machining stage. Moreover, fine patterns were delineated into electronic diamond devices.