Development of an apparatus for electron beam assisted chemical machining of diamond tools

首先，研制了电子束辅助化学加工(EBACE)装置。在此基础上，研究了EBACE加工金刚石的特点，为EBACE在超精密金刚石工具加工中的应用以及在电子金刚石器件中勾画出精细图形奠定了基础。去年，我们开发了在钻石探头顶部制作三维轮廓的加工阶段。实验结果表明：(1)在氢气和氧气气氛中，成功地制作了孔、线和矩形图形。(2)在氢气气氛中制作矩形图形时，刻蚀深度与刻蚀时间成正比，并且刻蚀深度随束流扫描速度和加速电压的降低而增加。(3)从拉曼光谱可以看出，EBACE加工的单晶金刚石芯片没有损伤。(4)利用所研制的加工平台，成功地制作了金刚石探头顶部的三维凸起。此外，电子钻石装置中还描绘了精细的图案。

At first, we developed an apparatus for the electron beam assisted chemical machining (EBACE). Then, machining characteristics of diamond by the EBACE was investigated in order to apply the EBACE to finishing ultra-precision diamond tools and to delineating fine patterns into electronic diamond devices. Last year, we developed the machining stage for making the three dimensional profile on the top of a diamond probe. From the experiments, following results are obtained.(1) Hole, line and rectangular patterns were successfully fabricated by EBACE with hydrogen and oxygen gases.(2) In the case of fabrication of the rectangular pattern with hydrogen gas, the etched depths are proportional to the etching time also the etched depth increases with a decrease of the heam scan speed and acceleration voltage of beam.(3) From Raman spectroscopy, it is conclude that the single crystal diamond chip machined with EBACE has no damage.(4) The three dimensional protrusion on the top of a diamond probe was successfully fabricated utilizing the developed machining stage. Moreover, fine patterns were delineated into electronic diamond devices.