Reactive Ion Beam Machining of Diamond Tools

金刚石工具的反应离子束加工

• 批准号: 05650126
• 负责人: MIYAMOTO Iwao
• 金额: $ 1.47万
• 依托单位: Science University of Toyko
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05650126/
• 关键词: Reactive ion beam; Diamond tool; Oxygen; Machining rate; Ion Energy; Ion incident angle; Radiation damage; Molecular dynamics; ダイヤモンドバイト; 照射損傷; 酸素イオン; 水素イオン; ECR型イオン源; カウフマン型イオン源; イオンエネルギー; イオン入射角

In order to apply the reactive ion beam machining with oxygen and hydrogen ions to ultra-precision processing of diamond tools, the dependence of the machining rate of (100) face of diamond chips on the ion energy, ion incidence angle, the ion current density and the wotk-piece temparature during processing were mainly investigated. The machining rate for "reactive" oxygen ion beam machining which includes both physical sputtering and chemical etching is about ten times faster than that for ion beam machining using "inert" argon ions which causes only physical sputtering. Moreover, the surface roughness of the diamond chip after oxygen ion beam machining which was measured using Atomic Force Microscope is about six times smaller than that before machining.From machining characteristics such as angular dependence of the machining rate and so on, it is concluded that machining mechanisum in the casehydrogen ions is physical sputtering without chemical reaction.Molecular dynamics simulation of ion beam machining is usefull for understanding the radiation damage of single crystal diamond.

为了将氢氧离子反应离子束加工技术应用于金刚石刀具的超精密加工，主要研究了加工过程中离子能量、离子入射角、离子电流密度和工件温度对金刚石切屑（100）面加工速率的影响。“活性”氧离子束加工（包括物理溅射和化学蚀刻）的加工速度大约是使用“惰性”氩离子的离子束加工（仅引起物理溅射）的加工速度的十倍。原子力显微镜测量的氧离子束加工后的金刚石切屑表面粗糙度比加工前减小了约6倍。从加工速率的角度依赖性等加工特性出发，得出在氢离子情况下的加工机理是物理溅射而非化学反应。离子束加工的分子动力学模拟有助于理解单晶金刚石的辐射损伤。

项目成果

I.Miyamoto et al: "Machining Characteristics of Diamond Processed with Reactive Ion Beam" Proc.of BEAMS. 89-92 (1994)

I.Miyamoto 等人：“用反应离子束加工的金刚石的加工特性”Proc.of BEAMS。

宮本岩男ほか: "リアクティブイオンビームによるダイヤモンドの加工特性" Proc.of BEAMS. 89-92 (1944)

Iwao Miyamoto 等人：“通过反应离子束加工金刚石的特性”Proc. of BEAMS 89-92 (1944)。

I.Miyamoto et al.: "Oxgen Ion Beam Etching of Diamond(100)" Droc.of ASPE 1993 Annual Metting. 301-304 (1993)

I.Miyamoto 等人：“Oxgen Ion Beam Etching of Diamond(100)”Droc.of ASPE 1993 年会。

宮本岩男ほか: "リアクティブイオンビームによるダイヤモンドの超精密加工" 砥粒加工学会誌. 38. 262-266 (1944)

Iwao Miyamoto 等人：“通过反应离子束对金刚石进行超精密加工”《磨料加工学会杂志》38. 262-266 (1944)。

宮本岩男,清原修二: "リアクティブイオンビームによるダイヤモンドの起精密加工" 砥粒加工学会誌. (印刷中).

Iwao Miyamoto、Shuji Kiyohara：“使用反应离子束对金刚石进行精密加工”磨料加工学会杂志（正在印刷中）。