Development of Three-Dimensional Measuring System for Wide-Range and High-Resolution

本课题开发了尺寸和形态两方面的测量与评价系统。主要结果如下：(1)圆柱件大量程测量系统及数据处理系统实现了偏心凸轮轴、滚动轴承环面等圆柱件在10^6动态范围内的测量。该系统由微机自动驱动，具有教学功能。由于偏心凸轮曲面和环面曲面没有确定的基准面，传统的方法无法对形状误差进行评估。在此基础上提出了“迭代最小二乘法”。该方法在保持各数据相互位置的条件下，将实测数据按度逼近解。(2)面向平面零件的大量程测量系统及数据处理系统。利用扫描电子显微镜（SEM）难以识别LSI图案等三维层状结构。利用上述技术，本项目研制了PZT驱动的大量程三维测量系统。该系统采用本研究提出的“原点-反转脉冲控制”来补偿压电陶瓷的滞回和蠕变。在这个系统中。测量精度约为4nm，动态范围为10^5。编制了表单错误可视化显示软件。

This project developed the measurement and evaluation system for the both of dimension and form. The main results are as follows.(1) Wide-Range Measuring System for Cylindrical Parts and Data-Processing SystemIt was achieved that cylindrical parts like eccentric cam shafts or torus surfaces of rolling bearing could be measured in dynamic range of 10^6. This developed system was automatically driven by micro-computer and had a teaching function.As an eccentric cam surface or a torus surface does not have defined datum (s), the traditional techniques could not be applied to evaluate form errors. Then the project presented the new method named by "Iterative Least-Square Method". By this method, the measured data approach by degrees to solution under the condition to keep mutual positions among each data.(2) Wide-Range Measuring System for plane Parts and Data-Processing SystemIt was hard to recognize three-dimensionally layer structure like LSI pattern by SEM. By using above-mentioned techniques, this project developed the wide-range three-dimensional measuring system driven by PZT. In this system, hysteresis and creep of PZT were compensated by means of "the origin-reversion pulse control" which was originated in this research. In this system. measuring accuracy of about 4nm was realized and dynamic range was 10^5. The software to present form errors visually was prepared.