Simulation and Control of Deformations for Next Generation of Ultra Precision Machine Tools

目前的合作研究涉及超精密机床的变形模拟和控制，旨在为下一代超精密机床开发技术基础。研究结果如下：1.超精密机床热变形仿真系统的开发为了分析超精密机床的热变形，开发了基于有限元法的超精密机床热变形仿真系统。该仿真系统可以估计由于环境温度和超精密加工过程中产生的热量的干扰而引起的热变形.加工环境中的扰动对超精密加工过程的影响通过对超精密加工过程的实验和理论分析，阐明了加工环境中的扰动对加工精度的影响。从刀具和工件的热变形出发，分析了加工过程中产生的热量对加工误差的影响.环境扰动对超精密机床的影响采用实验方法和有限元方法对超精密机床和超精密主轴的热变形进行了分析，以阐明机床周围环境中热扰动的影响.超精密机床变形的控制探讨了超精密机床变形的控制方法，旨在建立有效的超精密机床变形补偿控制方法。提出了一种利用光学线性标尺实现超精密进给机构的反馈控制系统。

The present co-operative research deals with simulation and control of deformations of ultra precision machine tools aiming at developing technological bases for the next generation of ultra precision machine tools. The results are summarized as follows ;1. Development of a simulation system to estimate deformations of ultra precision machine toolsA simulation system was developed based on the FEM (Finite Element Method) in order to analyze thermal deformations of ultra precision machine tools. the simulation system can estimate the thermal deformations due to disturbance of the environmental temperature and the heat generated in the ultra precision machining process.2. Effect of disturbance in machining environment on ultra precision machining processExperimental and theoretical analysis of the ultra precision machining process was carried out to clarify the effects of the disturbance in the machining environment on the machining accuracy. In particular, the machining errors due to the heat generated in the machining process was discussed based on the thermal deformations of the cutting tools and the work pieces.3. Effect of environmental disturbance on ultra precision machine toolsThe thermal deformations of the ultra precision machine tools and the ultra precision spindles ware analyzed applying both the experimental methods and the FEM in order to clarify the effects of the thermal disturbance in the environments surrounding the machine tools.4. Control of deformations of ultra precision machine toolsControl methods were discussed aiming at establishing effective control method to compensate the deformations of the ultra precision machine tools. A feed back control system was proposed to realize an ultra precision feed mechanism with use of an optical linear scale.