ULTRAPRECISION MACHINING OF 3 DIMENSIONAL MICRO STRUCTURES BY APPLYING ELLIPTICAL VIBRATION CUTTING

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The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;1. Development of vibration control system A new control system to stabilize elliptical vibration during cutting process is developed, and it is confirmed that the amplitudes in the two directions and their phase shift are kept to desired values.2. Analysis of finished surfaces Cutting experiments were carried out by employing the developed vibration device, and the finished surfaces were analyzed in terms of machining accuracy and roughness.3. Machining of 3 dimensional micro structures Hardened steel dies for 3 dimensional micro parts such as flesnel lenses, micro pick up lenses and back light panels for LCD's were machined by the elliptical vibration cutting, and ultraprecise micro machining was successfully achieved, which has been impossible by the conventional machining methods.