ULTRAPRECISION MACHINING OF 3 DIMENSIONAL MICRO STRUCTURES BY APPLYING ELLIPTICAL VIBRATION CUTTING

应用椭圆振动切割对 3 维微结构进行超精密加工

• 批准号: 12450061
• 负责人: MORIWAKI Toshimichi
• 金额: $ 9.02万
• 依托单位: KOBE UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12450061/
• 关键词: Elliptical vibration cutting; Ultraprecision cutting; Diamond tool; Micro machining; Chip formation; Surface roughness; Shape accuracy; 3 dimensional structure

The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;1. Development of vibration control system A new control system to stabilize elliptical vibration during cutting process is developed, and it is confirmed that the amplitudes in the two directions and their phase shift are kept to desired values.2. Analysis of finished surfaces Cutting experiments were carried out by employing the developed vibration device, and the finished surfaces were analyzed in terms of machining accuracy and roughness.3. Machining of 3 dimensional micro structures Hardened steel dies for 3 dimensional micro parts such as flesnel lenses, micro pick up lenses and back light panels for LCD's were machined by the elliptical vibration cutting, and ultraprecise micro machining was successfully achieved, which has been impossible by the conventional machining methods.

经过两年的研究，本研究的目标已经圆满实现。取得的主要研究成果如下：1.振动控制系统的研制开发了一种新型的椭圆振动控制系统，实现了椭圆振动在切削过程中的稳定，并验证了其两个方向的幅值及其相移均保持在理想的范围内。利用研制的振动装置对加工后的表面进行了加工实验分析，并对加工后的表面进行了加工精度和粗糙度分析。利用椭圆振动加工技术，成功地实现了常规加工方法所不能实现的超精密微加工，实现了传统加工方法无法实现的超精密加工。

项目成果

社本 英二: "Walking Driveを用いた超精密XYΘテーブルの開発(第3報) -平面内3軸同時測定および駆動方法の提案"2002年度精密工学会春季大会学術講演会講演論文集. (発表予定). (2001)

Eiji Shamoto：“使用步行驱动的超精密XYθ工作台的开发（第3次报告）-平面内三轴同时测量和驱动方法的提案”2002年日本精密工程学会春季会议学术会议论文集（演讲）。 (2001)

社本 英二: "傾斜型楕円振動切削加工法の提案"2001年度精密工学会秋季大会学術講演会講演論文集. 353 (2001)

Eiji Shamoto：“倾斜椭圆振动切削方法的提案”2001年日本精密工程学会秋季会议学术会议论文集353（2001）。

Eiji SHAMOTO, Yuichi MURASE and Toshimichi MORIWAKI: "Development of XYθ Table Driven by Means of Walking Drive (1st Report) - Proposal of Driving method with Predetermined Displacement Patterns"JSPE. Vol. 67, No. 6. 954-959 (2001)

Eiji SHAMOTO、Yuichi MURASE 和 Toshimichi MORIWAKI：“通过步行驱动方式驱动 XYθ 工作台的开发（第 1 次报告）- 具有预定位移模式的驱动方法的提案”JSPE，第 67 卷，第 6. 954-959 期（2001 年）

Toshimichi Moriwaki. Eiii Shamoto, Katsutoshi Tanaka, Makoto Matsuo and Michio Osada: "Development of Ultraprecision 5-Axis Machine Tool Equipped with Elliptical Vibration Cutting Device"10th International Conference on Precision Engineering. 589-593 (200

森胁敏通.

Eiji SHAMOTO, Norikazu SUZUKI, Toshimichi MORIWAKI and Yoshikazu NAOI: "Elliptical Vibration Cutting (4th Report) - Development of Tool Vibration Control System and Its Application to Ultraprecision Cutting"JSPE. Vol. 67, No. 11. 1871-1877 (2001)

Eiji SHAMOTO、Norikazu SUZUKI、Toshimichi MORIWAKI 和 Yoshikazu NAOI：“椭圆振动切削（第四次报告）-刀具振动控制系统的开发及其在超精密切削中的应用”JSPE。