Development of Precision Straightness Measuring System

1)在本研究中，首先对新测量方法的发展进行了实地调查。通过测量表明，对于精密机床或测量仪器精度的精密测量，测量用应变片的形状误差补偿是不可避免的。从这一角度出发，提出了一种新的运动直线度测量方法。计算机仿真表明，该测量方法具有0.01微米的测量精度。2)研制了一种用于直线度测量的电容式精密位移传感器。对其分辨率、线性和频率响应等基本特性进行了评价。通过计算机仿真和实验研究了该传感器的空间频率特性。3)将新开发的直线度测量方法应用于三坐标测量机的精度测量，结果表明该测量方法符合精密机床精度评定的要求。

1) In this study, at first the field survey for the development of new measuring method was carrried out. By the survey, it has been made clear that compensation of form error of strainghtedge which is used for measurement is inevitable for the precision measurement for the accuracy of precision machine tools or measuring instruments. From this stand point, new measuring method for straightness of motion has been proposed. A computer simulation shows that the measuring method has capability of measuring accuracy in the range of 0.01 mum.2) A capacitive type precision displacement sensor which is used for the straightness measurement has been developed. The basic characteristic such as resolution, lineality and frequency response were evaluated. The spatial frequency characteristic of the sensor has been investigated by computer simulation and experiment also. In the past, the spatial frequency of capacitive type displacement sensor was not clear.3) Newly development straightness measuring method has been applied for the measurement of accuracy of coordinate measuring machine, and the results shows the measuring method conforms for the accuracy evaluation of precise machines.