DEVELOPMENT OF OPTICAL ACTUATORS FOR DRIVING MICROMACHINES

为了开发驱动微机械的光学驱动器，开展了以下研究工作：1)研究形状记忆合金的光热振动。与其他常规材料相比，其波幅很大。2)研制了基于形状记忆合金和偏置弹簧的光学振子。在300 mW的激光功率照射下，获得了3 mm的位移和2N的产生力。3)研究了悬臂梁绕z轴的光热旋转。用两束相差90dGrey的激光照射悬臂梁。4)由两根扁平光缆组成的微型夹具。去除了光纤尖端的包覆层，制作了微悬臂梁。利用这两个悬臂梁，在液体中夹持了一个直径为0.1 mm的球体。5)研制了微型夹持器。在光缆周围设置了几根形状记忆导线。用功率为100 mW的激光照射一个重量为50g-w的球体。6)利用光纤尖端制作的激光驱动微悬臂梁的机械振动，研制了几种光学传感器。

In order to develop optical actuators for driving micromachines, following studies have been carried out.1)The photothermal vibration for shape-memory alloys was investigated. The amplitude was very large compared with the other conventional materials. The temperature characteristic of alloy was measured.2)The optical vibrator using shape-memory alloy and bias spring was developed. The displacement of 3 mm and the generation force 2N were obtained with irradiation of laser power of 300mW.A miniature water flow pump was driven with this actuator.3)The photothermal rotation of a cantilver around z-axis was investigated. The cantilever was irraditaed with two laserrs of which phases were differentiall by 90 dgree.4)The micro-pincette was constructed from two flat optical fiber cables. A clad layr was eliminated from the fiber-tip, and a microcantilever was fabricated. Using these two cantilver, a sphere of 0.1 mm was gripped in liquid.5)The micro-grippeer was developed. Several shape-memory wires were set up around the optical fiver. A sphere with a weight of 50g-w was gripped with irradiation laser power of 100mW.6)Several optical sensors were developed using the mechanical vibration of the laser-driven microcantilever fabricated from the optical fiber-tip.