Characterization at atomic level and nanoprocessing of material using high-voltage electron microscopy

用原子分辨率表征了各种陶瓷的基本结构和微观结构。建立了一种用元素映射法表征材料的新方法。对鳗鱼光谱的精确分析导致了纳米区域的电子结构和元素分析的确定。氧在YBCO中的局域浓度是由临界电压效应决定的，在高分辨电子显微镜下观察到有序相在有序-无序转变中的形核和生长。动态观察了位错、点缺陷等缺陷的行为，以及晶体的熔化过程。为了改善金刚石薄膜的性能，对金刚石薄膜的纳米加工进行了尝试。还观察了材料的辐射损伤，观察了晶体表面的生长过程和电子束的溅射。研究了电子束辐照金属间化合物的无序化和非晶化过程，建立了电子束纳米表征方法。电子层析成像被应用于识别大规模集成电路及其纳米加工中的结构缺陷。

Fundamental structure and microstructure of a variety of ceramics was characterized on atomic resolution. A new method for characterization of materials by the element mapping was established. Precise analysis of EELS spectra led to determination of electronic structure and elemental analysis from nanometer regions. Local concentration of oxygen in YBCO was determined by the critical voltage effect.Nucleation and growth of the ordered phase in the order-disorder transition was observed by high resolution electron microscopy. Behavior of defects such as dislocations and point defects and also melting process of crystals were observed dynamically. Nano-processing of diamond thin foils was attempted to improve its performance. Radiation damage of materials was also observed.Growth process at the crystal surface and sputtering by electron beam were observed. Diordering and amorphitization of intermetallic compound by electron irradiation was studied and a method of nanocharacterization using an electron beam was established. Electron tomography was applied to identifying structural defects in LSI and its nanoprocessing.