Evaluation method of tribological properties of ceramic coating film

为了开发出比以往更实用的陶瓷涂层摩擦学性能评价方法，在环境扫描电子显微镜的试验室中安装了销盘式摩擦试验机的ESEM摩擦试验机，以及带有两个用于划痕和表面观察的金刚石针尖的AFM摩擦试验机。硬质氮化碳涂层的比磨损量较小。2.在宏观摩擦磨损试验机上，氮化碳涂层在低载荷下表现出比碳更好的磨损性能。在ESEM摩擦体系下，氮化碳涂层与金刚石销在水蒸气中的摩擦系数小于0.1.4。在扫描电子显微镜摩擦体系下，当原子力显微镜金刚石销半径较大时，当接触压力较低时，氮化碳的耐磨性优于碳涂层。另一方面，当原子力显微镜的锋利的金刚石销接触压力较大时，碳涂层的耐磨性优于氮化碳。

In order to develop more useful evaluation method of tribological properties of ceramic coating film than previous ones, ESEM Tribo-SYSTEM where pin-on-disk type tribotester was installed in the chamber of Environmental Scanning Electron Microscope, and AFM Tribotester which has two diamond tips for scratching and observation of surface were developed.Obtained results are summarized as follows :1.Traditional macroscopic pin-on-disk tribotest was done for the carbon nitride coating films which were produced by ion beam assisted deposition method. Harder carbon nitride coating films showed small specific wear amount.2.Under macroscopic tribotester, carbon nitride showed better wear properties that carbon in low load. On the other hand, at the high load, carbon showed better wear resistance than carbon nitride.3.Under ESEM TRIBO-SYSTEM,friction coefficient of carbon nitride coating film against diamond pin in water vapor was less than 0.1.4.Under SEM TRIBO-SYSTEM,when low contact pressure by large radius of diamond pin of AFM,carbon nitride showed better wear resistance than that of carbon. On the other hand, when contact pressure was large by sharp diamond pin of AFM,carbon coating film showed better wear resistance than that of carbon nitride.