Development of Skillful Manipulation Robot in Ultra-micro World

本课题的研究目标是实现一种能在微物理环境下熟练执行超微操作的超微灵巧操作机器人系统。1995-1996年，我们完成了超微操纵系统的构建，明确了微物体的动力学特性，建立了完成微任务的熟练操作方法，并通过实际实验任务证明了所构建系统的有效性。详细说明如下。(1)超微操纵系统构建：完成了基本的机械硬件、控制软件和人机界面机制。因此，对人工操作的分析和新开发的操作算法的试验成为可能。(2)微观物体动力学的阐明：通过构建的微力测量系统进行系统实验，发现作用在微观物体上的粘附力为静电力，并且不仅受电荷势的影响，还受表面粗糙度的影响。此外，扫描电镜下微物体的充电电位一般为10 ~ 100V。根据这些结果，我们成功地估计了作用在微观物体上的粘附力为100到1000 nN。此外，这种力可以通过改变工具和物体的面面积来控制。(3)熟练操作算法的开发：为了将微物体放置在所需位置，我们开发了两种操作方法：接触面积缩小法和接触面积置换法。分析了两种方法的动力学特性，从理论上证明了两种方法的有效性。这些操作的机器人轨迹是数学推导出来的。(4)通过实验对构建的系统进行评价：利用上述算法对直径为20mum的微焊料球形颗粒的放置任务进行了尝试，验证了构建系统的有效性。少

The aim of this research is to realize an ultra-micro skillful manipulation robot system, which executes ultra-micro manipulation skillfully under micro physical environment. In 1995-1996, we completed the construction of the ultra-micro manipulation system, clarified the dynamics of micro objects, established skillful manipulation methods to accomplish micro tasks, and proved the effectiveness of the constructed system through actual experimental tasks. The details are explained in the following.(1) Construction of the ultra-micro manipulation system : We completed the basic mechanical hardware, the controlling software, and the human interface mechanisms. As a result, analysis of human operation and trials of newly developed operation algorithm became possible.(2) Elucidation of the dynamics of micro objests : Through systematic experiments by constructed micro force measurement system, the adhesive force acting on micro objects turned out to be the electrostatic force and to be affe … More cted not only by charging potential but by surface roughness. Besides, the charging potential of micro objects under scanning electron microscope measured typically 10 to 100V.From these results, we succeeded in estimating the adhesive force acting on micro objects to be 100 to 1000 nN.Moreover, this force turned out to controllable by modifying the facing area of the tool and the object.(3) Development of skillful operation algorithm : To place a micro object at the desired position, we developed two operation methods : the contact area reduction method and the contact area replacement method. The dynamics for the both methods were analyzed and their effectiveness was proved theoretically. The robot trajectories for thses operations were mathematically derived.(4) Evaluation of the constructed system through experiments : We tried the placing tasks of micro solder spherical particles of 20mum in diameter by the above algorithm, and the effectiveness of the constructed system was proved. Less