Secondary Cure of Laminated Patterns by Photofabrication

光加工技术是一种新型的图形加工技术。通过计算机控制的点激光束的三维扫描装置是可商购的。然而，由于激光束控制器和发生器的成本较高以及多层图案中形成层状表面，这些器件没有得到广泛应用。多层图案的侧面是层状的。为了抑制层状表面形成，将侧平面设置在玻璃容器中的光聚合物的底部，并再次暴露于UV射线。曝光后，层状表面的形成被明显抑制，表面粗糙度（Rmax）约为10 μ m。

Photofabrication is expected as a new technology for pattern manufacturing. Three dimensional plotter devices by computer controlled spot laser beam are available commercially. However, these devices are not widely applied due to the high cost of the laser beam controller and generator and the formation of a lamellar surface in multilayr patterns.A new device that is equipped with a mercury xenon lamp and an optical fiber was manufactured and multilayr patterns cured from the bottom by UV-rays of the device were fabricated. Side planes of the multilayr patterns were lamellar. In order to suppress lamellar surface formation, the side planes were set at the bottom of the phptopolymer in a glass vessel and re-exposed to UV-rays. After the exposure, lamellar sirface formation wassuppressed markedly and surface roughness (Rmax) was about 10 mum.