A Basic Research about a Multi-Scale Evaluation of Surface Form Measurement

本研究旨在提出一种曲面形状的多尺度公式，并实际开发一套多尺度测量系统。作者研制了一种由高分辨率显微镜及其拼接系统组成的大范围测量系统。该拼接方法首先通过相对于显微镜沿x、y方向水平移动来完成拼接，然后通过计算叠加指数和计算机优化方法在6个轴的平移和旋转方向上重新定位获得的数据。本研究的结果是：(1)通过实验建立了与重叠面积比以及是否使用附加数据的叠加精度；(2)可以在20×20个火焰范围内进行精确拼接。然后计算了多尺度特征，特别是局部山峰参数、山顶高度分布、体积和局部山丘的表面积，截面轮廓的横截面面积和周围长度以及这些参数的分布。最后，提出了一种新的海量多尺度数据的文件结构，方便了任意比例尺、任意分辨率的面状数据的读取和重建。这种结构对于通过CRT或打印机显示表面形式是有用的。在某些情况下，此方法可以压缩数据大小而不会丢失。

This research aims to propose a multi-scale formula of surface forms and to develop a multi-scale measuring system actually. The authors developed a wide-range measurement system that consists of a high-resolution microscope and of its stitching system. The stitching is done firstly by moving a work horizontally in x, y directions relatively against the microscope, secondly by relocating the obtained data to each other in 6 axes shifting and rotating with calculating the overlaying index and an optimization method by computer.The results of this research are (1) the overlaying accuracy is established against a overlapped area ratio and whether utilizing additional data or not experimentally, and (2) the precise connection can be done over 20 x 20 flames.Then multi-scale feature is calculated especially in local summit parameters, the summit height distribution, the volume and the surface area of local hill, the cross-sectional area and the surrounding length of the cut profile and the distribution of those parameters. There are some multi-scalability and some uniformity in the parameters.Finally, a new file structure of these huge amount multi-scale data is proposed so that the read out and re-construction an areal data in any scale and in any resolution are convenient. This structure is useful for showing the surface form by CRT or printer. This method can be expected to compress data size without missing in some cases.