Development of Ultraprecision High Speed XYθ Table Driven by Means of Walking Drive

经过两年的研究，本研究的目标已成功实现。主要研究成果如下：1.步进工作台的研制及其性能应用步进驱动原理研制了超精密XYθ工作台。测量了所研制工作台的刚度和直线运动精度。该装置具有大于38 N/μm的高刚度和小于0.5μ m的良好直线运动精度。2.双模驱动算法和软件的开发为了提高进给系统的最高速度，开发了双模驱动算法。当定位误差较大时，利用该算法实现了椭圆振动驱动平台的运动，与动物的奔跑运动相对应。另一方面，当误差较小时，它由与行走运动相对应的行走驱动器驱动。在此基础上开发了相应的软件。3.激光反馈系统的研制通过实验验证了所研制的反馈系统的可行性。实验结果表明，该进给系统具有良好的定位分辨率（5 nm）和较高的最大速度（24 mm/sec）。

The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;1.Development of walking table and its performanceUltraprecision XYθtable is developed by applying the principle of walking drive. Stiffness and straight motion accuracy of the developed table are measured. The device has a high stiffness of more than 38 N/μm and a good straight motion accuracy of less than 0.5μm.2.Development of algorithm and software for dual mode driveAn algorithm of dual mode drive is developed in order to improve the maximum speed of the feed system. By the developed algorithm, the table is driven by elliptical vibration, which corresponds to running motion of animals, when the positioning error is large. On the other hand, it is driven by the walking drive, which corresponds to walking motion , when the error is small. Software is developed here based on the above algorithm.3.Development of laser feedback systemA feedback feasibility of the developed feed system is verified experimentally. The experimental results show that the feed system has an excellent positioning resolution of 5 nm and a relatively high maximum speed of 24 mm/sec.