Smart Nano-Machining and Measurement System with Diamond Probe Array Integrated with Piezoelectric Sensors and Actuators

本论文主要研究了金刚石薄膜的微加工技术，并将金刚石探针阵列与压电传感器和驱动器集成在一起，开发了一种智能纳米加工与测量系统。这些技术包括金刚石薄膜的图案化、用于制造从衬底上释放的可移动微结构的牺牲层蚀刻、用于制造三维微结构的模具技术以及用于组装和封装的键合技术。接下来，利用模具技术制造的金刚石探针，我们开发了具有原位STM功能的超精密加工系统。结果表明，这种新开发的金刚石针尖是有效的加工工具和STM针尖。然后，我们已经开发了一种批量制造工艺的金刚石AFM探针。这个过程包括我们新开发的玻璃背面阳极键合技术 ...更多信息 将板安装到金刚石底座上，金刚石探针已连接到该底座上，以便于操作。金刚石探针的制作采用了选择性沉积法制作金刚石悬臂梁和硅模技术制作尖锐的金刚石针尖。通过有限元模拟优化设计了用于接触式AFM测量的金刚石探针，探针由两种弹簧常数分别为1 N/m和5 N/m的V形悬臂梁组成。最后，为了实现压电传感器和驱动器，我们研究了ZnO和PZT等压电薄膜的最佳溅射条件，得到压电常数d31分别为3和90 pC/N左右。利用我们新开发的基于悬臂梁自由振动理论的薄膜压电常数d31的测量方法测量了这些值。我们也发展了压电薄膜的图案化技术。少

We have been developing a smart nano-machining and measurement system with a diamond probe array integrated with piezoelectric sensors and actuators.In order to realize this system, first, we have developed a variety of micromachining techniques of diamond thin films. These include the patterning of diamond thin films, sacrificial layer etching for the fabrication of movable microstructures being released from a substrate, a mold technique for the fabrication of three-dimensional microstructures, and bonding for assembly and packaging.Next, using a semiconductive diamond tip fabricated by the mold technique, we have developed an ultraprecision machining system with an in situ STM function. The results obtained showed that this newly developed semiconductive diamond tip was effective both as a machining tool and an STM tip.Then, we have developed a batch fabrication process for diamond AFM probes. This process includes our newly developed technique for the anodic bonding of a glass back … More ing plate to a diamond base, to which diamond probes have been attached, to facilitate handling. The diamond probes having been fabricated selective deposition for patterning a diamond cantilever and a Si mold technique for producing a sharp diamond tip. The fabricated diamond probes were optimally designed for contact mode AFM measurements by FEA simulations, and consisted of two kinds of V-shaped cantilever with spring constants of approximately 1 N/m and 5 N/m. These diamond probes proved capable of measuring AFM images.Finally, in order to realize the piezoelectric sensors and actuators, we have studied the optimum sputtering conditions of piezoelectric thin films such as ZnO and PZT, giving the piezoelectric constants d31 of around 3 and 90 pC/N, respectively. The values were measured using our newly developed measurement method for the piezoelectric constant d31 of thin film, based on the free vibration theory of cantilever beams. We have also developed the patterning techniques of the piezoelectric thin films. Less