Smart Nano-Machining and Measurement System with Diamond Probe Array Integrated with Piezoelectric Sensors and Actuators

我们开发了一种智能纳米加工和测量系统，该系统采用了集成了压电传感器和执行器的金刚石探针阵列。为了实现这一系统，首先，我们对金刚石薄膜的各种微加工技术进行了研究。然后，我们开发了一种批量制造金刚石原子力显微镜探头的工艺。金刚石探头是通过选择性沉积金刚石悬臂梁和用于制造锋利的金刚石尖端的硅模技术以及玻璃背板与钻石底座的阳极结合技术来制造的，钻石探头已经附着在钻石底座上，以便于处理。通过有限元模拟，优化设计了适用于接触式原子力显微镜测量的金刚石探针，该探针由两种弹性常数约为1N/m和5N/m的V形悬臂梁组成，能够测量原子力显微镜图像。此外，我们在d…上制备了锆钛酸铅薄膜更多的薄膜衬底，并测试其压电性能。对室温下在金刚石薄膜衬底上溅射的PZT薄膜进行了氮气气氛下的快速热退火。在升温速率为10℃/S，热处理温度为700℃的条件下，沉积的薄膜发生了向钙钛矿结构的相变。然而，由于金刚石薄膜表面粗糙，压电常数d_&lt；31&gt；可能很低，约为-20pC/N。极化是一种有效的提高压电常数的工艺，约为-65pC/N。为了在金刚石悬臂梁上制作压电传感器和驱动器的结构，RIE还成功地在SF_6等离子体中使用铂掩膜层作为上电极，在不破坏金刚石悬臂层的情况下制备了PZT薄膜。利用我们开发的PZT薄膜制备和图形化技术，我们实现了一种带有PZT传感器和驱动器的金刚石原子力显微镜探头。在外加电压为8V时，获得了0.4 nm的传感分辨率和12μN的驱动力。较少

We have developed a smart nano-machining and measurement system with a diamond probe array integrated with piezoelectric sensors and actuators. In order to realize this system, first, we have studied on a variety of micromachining techniques of diamond thin films. Then, we have developed a batch fabrication process for diamond AFM probes. The diamond probes were fabricated by selective deposition for patterning a diamond cantilever and a Si mold technique for producing a sharp diamond tip together with the anodic bonding technique of a glass backing plate to a diamond base, to which the diamond probes have been attached, to facilitate handling. The fabricated diamond probes were optimally designed for contact mode AFM measurements by FEA simulations, and consisted of two kinds of V-shaped cantilever with spring constants of approximately 1 N/m and 5 N/m. These diamond probes proved capable of measuring AFM images.In addition, we fabricated lead zirconate titanate (PZT) thin film on a d … More iamond thin film substrate and examined its piezoelectric properties. We applied the rapid thermal annealing in a N_2 ambient for PZT thin film sputtered at room temperature on a diamond thin film substrate. Under conditions of a temperature ramp rate of 10℃/s and an annealing temperature of 700℃, deposited PZT thin film showed a phase transformation to a perovskite structure. However, piezoelectric constant d_<31> was potentially low, about -20 pC/N, due to rough surface of the diamond thin film. Poling was proved to be an effective process to improve a piezoelectric constant, that being about -65 pC/N. In order to fabricate the structure of a piezoelectric sensor and actuator on a diamond cantilever, PZT thin film was also successfully patterned by RIE in SF_6 plasma using a Pt mask layer to be used as an upper electrode without damaging the diamond cantilever layer. Using our developed fabrication and patterning techniques of PZT thin film, we realized a diamond AFM probe with a PZT sensor and actuator. A sensing resolution of 0.4 nm and an actuation force of 12 μN at an applied voltage of 8 V were obtained. Less