Smart Nano-Machining and Measurement System with Diamond Probe Array Integrated with Piezoelectric Sensors and Actuators

智能纳米加工和测量系统，配备集成了压电传感器和执行器的金刚石探针阵列

• 批准号: 13555068
• 负责人: SHIBATA Takayuki
• 金额: $ 8.38万
• 依托单位: IBARAKI UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555068/
• 关键词: Smart nano-machining and measurement system; Nanolithography; Atomic force microscope; AFM probes; Diamond thin films; Piezoelectric thin films; Actuators; Sensors; 次世代ナノ加工・計測システム; ナノリソグラフィー

We have developed a smart nano-machining and measurement system with a diamond probe array integrated with piezoelectric sensors and actuators. In order to realize this system, first, we have studied on a variety of micromachining techniques of diamond thin films. Then, we have developed a batch fabrication process for diamond AFM probes. The diamond probes were fabricated by selective deposition for patterning a diamond cantilever and a Si mold technique for producing a sharp diamond tip together with the anodic bonding technique of a glass backing plate to a diamond base, to which the diamond probes have been attached, to facilitate handling. The fabricated diamond probes were optimally designed for contact mode AFM measurements by FEA simulations, and consisted of two kinds of V-shaped cantilever with spring constants of approximately 1 N/m and 5 N/m. These diamond probes proved capable of measuring AFM images.In addition, we fabricated lead zirconate titanate (PZT) thin film on a d … More iamond thin film substrate and examined its piezoelectric properties. We applied the rapid thermal annealing in a N_2 ambient for PZT thin film sputtered at room temperature on a diamond thin film substrate. Under conditions of a temperature ramp rate of 10℃/s and an annealing temperature of 700℃, deposited PZT thin film showed a phase transformation to a perovskite structure. However, piezoelectric constant d_<31> was potentially low, about -20 pC/N, due to rough surface of the diamond thin film. Poling was proved to be an effective process to improve a piezoelectric constant, that being about -65 pC/N. In order to fabricate the structure of a piezoelectric sensor and actuator on a diamond cantilever, PZT thin film was also successfully patterned by RIE in SF_6 plasma using a Pt mask layer to be used as an upper electrode without damaging the diamond cantilever layer. Using our developed fabrication and patterning techniques of PZT thin film, we realized a diamond AFM probe with a PZT sensor and actuator. A sensing resolution of 0.4 nm and an actuation force of 12 μN at an applied voltage of 8 V were obtained. Less

我们开发了一种智能纳米加工和测量系统，该系统具有集成了压电传感器和执行器的金刚石探针阵列。为了实现该系统，首先，我们对金刚石薄膜的多种微加工技术进行了研究。然后，我们开发了金刚石 AFM 探针的批量制造工艺。金刚石探针是通过用于形成金刚石悬臂图案的选择性沉积和用于生产锋利金刚石尖端的硅模具技术以及玻璃背板到金刚石底座的阳极键合技术来制造的，金刚石探针已附着在金刚石底座上以方便操作。所制造的金刚石探针经过 FEA 模拟针对接触模式 AFM 测量进行了优化设计，由弹簧常数约为 1 N/m 和 5 N/m 的两种 V 形悬臂组成。这些金刚石探针被证明能够测量 AFM 图像。此外，我们在金刚石薄膜基底上制备了锆钛酸铅 (PZT) 薄膜，并检查了其压电特性。我们在 N_2 环境中采用快速热退火技术，在金刚石薄膜基底上室温溅射 PZT 薄膜。在升温速率为10℃/s、退火温度为700℃的条件下，沉积的PZT薄膜表现出向钙钛矿结构的相变。然而，由于金刚石薄膜的粗糙表面，压电常数d_<31>可能较低，约为-20pC/N。事实证明，极化是提高压电常数的有效方法，压电常数约为-65 pC/N。为了在金刚石悬臂梁上制作压电传感器和执行器的结构，在不损坏金刚石悬臂梁层的情况下，利用Pt掩模层作为上电极，在SF_6等离子体中通过RIE成功地对PZT薄膜进行图案化。利用我们开发的 PZT 薄膜制造和图案化技术，我们实现了带有 PZT 传感器和执行器的金刚石 AFM 探针。在施加电压为 8 V 时，获得了 0.4 nm 的传感分辨率和 12 μN 的驱动力。较少的

项目成果

K.Unno: "Smart Nano-Machining and Measurement System with Semiconductive Diamond Probe"Smart Materials and Structures. 10・4. 730-735 (2001)

K.Unno：“使用半导体金刚石探针的智能纳米加工和测量系统”智能材料和结构10・4（2001）。

T.Shibata, K.Unno, E.Makino, Y.Ito, S.Shimada: "Characterization of Sputtered ZnO Thin Film as Sensor and Actuator for Diamond AFM Probe"Sensors and Actuators. A102(1-2). 106-113 (2002)

T.Shibata、K.Unno、E.Makino、Y.Ito、S.Shimada：“溅射 ZnO 薄膜作为金刚石 AFM 探针传感器和执行器的表征”传感器和执行器。

柴田隆行, 牧野英司: "ダイヤモンドMEMS"砥粒加工学会誌. 46(6). 286-289 (2002)

Takayuki Shibata，Eiji Makino：“金刚石 MEMS”磨料加工学会杂志 46(6) (2002)。

T.Shibata, E.Makino: "Diamond-based Microelectro-mechanical Systems (MEMS)(in Japanese)"J Jpn. Soc. Abrasive Technol.. 46,6. 286-289 (2002)

T.Shibata、E.Makino：“基于金刚石的微机电系统 (MEMS)（日语）”J Jpn。

K.Unno, Y.Kitamoto, T.Shibata, E.Makino: "Smart Nano-Machining and Measurement System with Semiconductive Diamond Probe"Smart Materials and Structures. 10(4). 730-735 (2001)

K.Unno、Y.Kitamoto、T.Shibata、E.Makino：“采用半导体金刚石探针的智能纳米加工和测量系统”智能材料和结构。