Development of High-Quality and High-Throughput Micro-HoleProcessing Using Hollow Microneedle Array

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）：A novel thermal imprinting technique has been developed to enable　the high-throughput fabrication of through holes with a minimum feature of a few tens of　micrometers in a wide variety of polymers with high quality and precision by using an　array of out-of-plane, hollow microneedles as an imprint tool. This technique can also be　applicable to the formation of through holes with almost any non-circular cross-sections　(triangle, square, star-shaped holes, etc.) as well as circular ones.