Development of Cell Surgery System on a Chip with Nanoneedle Array

纳米针阵列芯片上细胞手术系统的开发

基本信息

项目摘要

In order to realize cell surgery on a chip-based system, we have developed key devices such as a bio-microdevice actuated by piezoelectric thin film for the enhancement of cell functions (cell multiplication and gene transfer) by applying mechanical stimulation to cells and a nanoneedle array capable of introducing biomolecules of interest into living cells and the parallel extracting biomolecules expressed in the cells.First, we optimized the design of the bio-microdevice using a finite element method (FEM). The maximum displacement at the center of a silicon nitride (Si_3N_4) diaphragm (with more than 100×100 μm^2 in size) was estimated to be more than the target value of 100 nm, when a voltage of 10 V was applied to the PZT thin film actuator. Moreover, we fabricated PZT thin film to be used as an actuator by a sol-gel method, and characterized its crystallographic structure. As a result, when pyrolysis at 320℃ for 1 min and then annealed at 600℃ for 1 min in air, PZT thin films with (111) orientation were obtained.In addition, we developed a novel and simple micromachining technique for the fabrication of out-of-plane, hollow nanoneedles in array. An array of silicon dioxide (SiO_2) needles with a circler tip shape (an inner diameter of 3.5 μm, an outer diameter of 6.0 μm and a height of 45 μm) were successfully fabricated by a combination of an anisotropic deep reactive ion etching (DRIE) process for producing thorough holes into a Si substrate as a needle mold followed by wet oxidation and an isotropic XeF_2 etching process for leaving SiO_2 nanoneedle structures. In order to fabricate high-aspect-ratio microchannels and through holes in a glass substrate, a sand blasting technique using a polymer (PDMS) as a mask material, which was patterned using a thick photoresist (SU-8) as a mold, was also developed.
为了在基于芯片的系统上实现细胞手术,我们开发了关键设备,例如由压电薄膜驱动的用于增强细胞功能的生物微型设备本发明涉及通过对细胞施加机械刺激来实现细胞增殖(细胞增殖和基因转移)的纳米针阵列和能够将感兴趣的生物分子引入活细胞中并并行提取在细胞中表达的生物分子的纳米针阵列。我们使用有限元法(FEM)优化了生物微器件的设计。当PZT薄膜驱动器上施加10 V的电压时,氮化硅(Si_3N_4)膜片(尺寸大于100×100 μm^2)中心处的最大位移估计大于100 nm的目标值。此外,我们还采用溶胶-凝胶法制备了PZT薄膜作为驱动器,并对其晶体结构进行了表征。结果表明,在320℃热解1 min,然后在空气中600℃退火1 min,得到了(111)取向的PZT薄膜。具有圆形尖端形状的二氧化硅(SiO_2)针阵列(内径3.5 μm,采用各向异性深反应离子刻蚀(DRIE)工艺在Si衬底上形成通孔,然后进行湿法氧化,并结合各向同性XeF_(1-x)工艺,成功地制备了外径为6.0 μm,高度为45 μm的2刻蚀工艺,留下SiO_2纳米针结构。为了在玻璃基板中制造高纵横比的微通道和通孔,还开发了使用聚合物(PDMS)作为掩模材料的喷砂技术,该掩模材料使用厚光致抗蚀剂(SU-8)作为模具进行图案化。

项目成果

期刊论文数量(6)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Development of bio-microdevice actuated by piezoelectric thin film for enhancement of cell functions
开发压电薄膜驱动的生物微器件以增强细胞功能
Accelerating system of cell multiplication with nanometer vibration
纳米振动细胞增殖加速系统
Development of Bio-Microdevice Actuated by Piezoelectric Thin Film for Cell Culture
压电薄膜驱动的细胞培养生物微器件的研制
オンチップ細胞サージェリーシステムのためのナノニードルアレイの開発-シリコンのドライエッチング特性の評価-
用于片上细胞手术系统的纳米针阵列的开发-硅干蚀刻特性的评价-
細胞機能制御のためのMEMS細胞加振デバイスの開発
开发用于细胞功能控制的MEMS细胞振动装置
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SHIBATA Takayuki其他文献

電子プローブマイクロアナライザー(EPMA)を用いた新生代のCHIME年代測定の要素技術:不感時間補正
使用电子探针微量分析仪(EPMA)进行新生代CHIME测年的基本技术:死区时间校正
  • DOI:
  • 发表时间:
    2020
  • 期刊:
  • 影响因子:
    0
  • 作者:
    TANIZAKI Kohei;SANTRA Tuhin Subhra;SHIBATA Takayuki;NAGAI Moeto;加藤丈典・陳美呈
  • 通讯作者:
    加藤丈典・陳美呈
Numerical analysis of cell membrane perforation in on-chip microdroplet-based electroporation (Membrane perforation characteristics when electrodes are placed on the same plane)
片上微滴电穿孔细胞膜穿孔的数值分析(电极置于同一平面时的膜穿孔特性)
  • DOI:
    10.1299/transjsme.20-00446
  • 发表时间:
    2021
  • 期刊:
  • 影响因子:
    0
  • 作者:
    NAKASHIMA Kenji;MATSUYAMA Fuminori;JOHNO Yuuki;ISHII-TESHIMA Miho;SHIBATA Takayuki
  • 通讯作者:
    SHIBATA Takayuki

SHIBATA Takayuki的其他文献

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{{ truncateString('SHIBATA Takayuki', 18)}}的其他基金

Development of Visualization Technique of Nanofabrication Processing with Photocatalytic AFM Probes
光催化AFM探针纳米加工可视化技术的发展
  • 批准号:
    18K18805
  • 财政年份:
    2018
  • 资助金额:
    $ 9.79万
  • 项目类别:
    Grant-in-Aid for Challenging Research (Exploratory)
Development of early detection method for Chronic Obstructive Pulmonary Disease
慢性阻塞性肺疾病早期检测方法的开发
  • 批准号:
    15K07892
  • 财政年份:
    2015
  • 资助金额:
    $ 9.79万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
Development of High-Quality and High-Throughput Micro-HoleProcessing Using Hollow Microneedle Array
利用空心微针阵列开发高质量和高通量的微孔加工
  • 批准号:
    23656103
  • 财政年份:
    2011
  • 资助金额:
    $ 9.79万
  • 项目类别:
    Grant-in-Aid for Challenging Exploratory Research
Development of a novel fluorescence derivatization method for the screening of the risk of side effects caused by anticancer drugs
开发新型荧光衍生化方法用于筛查抗癌药物副作用风险
  • 批准号:
    23790051
  • 财政年份:
    2011
  • 资助金额:
    $ 9.79万
  • 项目类别:
    Grant-in-Aid for Young Scientists (B)
Whether the self-government state is contradictory. Study on theory of self-government by Lorenz von Stein
自治国家是否矛盾。
  • 批准号:
    22520079
  • 财政年份:
    2010
  • 资助金额:
    $ 9.79万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
Development of On-Chip Cell Manipulation System Capable of Massively Parallel Patterning of Single Cells
开发能够大规模并行单细胞图案化的片上细胞操纵系统
  • 批准号:
    20300156
  • 财政年份:
    2008
  • 资助金额:
    $ 9.79万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Development of Bioprobe Integrated with Microneedle for Cellular Function Analysis
开发与微针集成的生物探针用于细胞功能分析
  • 批准号:
    18300150
  • 财政年份:
    2006
  • 资助金额:
    $ 9.79万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Smart Nano-Machining and Measurement System with Diamond Probe Array Integrated with Piezoelectric Sensors and Actuators
智能纳米加工和测量系统,配备集成了压电传感器和执行器的金刚石探针阵列
  • 批准号:
    13555068
  • 财政年份:
    2001
  • 资助金额:
    $ 9.79万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Can Ludwig Feuerbach reconstruct the History of Philosophy?
路德维希·费尔巴哈能否重构哲学史?
  • 批准号:
    13610015
  • 财政年份:
    2001
  • 资助金额:
    $ 9.79万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
Smart Nano-Machining and Measurement System with Diamond Probe Array Integrated with Piezoelectric Sensors and Actuators
智能纳米加工和测量系统,配备集成了压电传感器和执行器的金刚石探针阵列
  • 批准号:
    10555075
  • 财政年份:
    1998
  • 资助金额:
    $ 9.79万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)

相似海外基金

Development of Nanoneedle Array for Painless and Long-Term Sustained Intraocular Drug Delivery
开发用于无痛、长期持续眼内药物输送的纳米针阵列
  • 批准号:
    10280693
  • 财政年份:
    2021
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    $ 9.79万
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Localized Chemical Detection with Maintained Single Protein Channel Recordings on Nanoneedle Probes
在纳米针探针上保持单蛋白通道记录的局部化学检测
  • 批准号:
    2108368
  • 财政年份:
    2021
  • 资助金额:
    $ 9.79万
  • 项目类别:
    Continuing Grant
Minimally Invasive Molecularly Imprinted Conductive Nanoneedle Sensors
微创分子印迹导电纳米针传感器
  • 批准号:
    EP/V010859/1
  • 财政年份:
    2021
  • 资助金额:
    $ 9.79万
  • 项目类别:
    Research Grant
Development of Nanoneedle Array for Painless and Long-Term Sustained Intraocular Drug Delivery
开发用于无痛、长期持续眼内药物输送的纳米针阵列
  • 批准号:
    10480936
  • 财政年份:
    2021
  • 资助金额:
    $ 9.79万
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Development of Nanoneedle Array for Painless and Long-Term Sustained Intraocular Drug Delivery
开发用于无痛、长期持续眼内药物输送的纳米针阵列
  • 批准号:
    10673052
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    2021
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The Nanoneedle Net: A flexible and transparent 3D nanoelectrode array for mapping intracellular dendritic dynamics at the cortical surface
Nanoneedle Net:一种灵活且透明的 3D 纳米电极阵列,用于绘制皮质表面的细胞内树突动力学
  • 批准号:
    10378637
  • 财政年份:
    2020
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The Nanoneedle Net: A flexible and transparent 3D nanoelectrode array for mapping intracellular dendritic dynamics at the cortical surface
Nanoneedle Net:一种灵活且透明的 3D 纳米电极阵列,用于绘制皮质表面的细胞内树突动力学
  • 批准号:
    10160915
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    2020
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A SERS nanoneedle system for studying Staphylococcus aureus survival in live cells
用于研究金黄色葡萄球菌在活细胞中存活的 SERS 纳米针系统
  • 批准号:
    10261482
  • 财政年份:
    2019
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    $ 9.79万
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A SERS nanoneedle system for studying Staphylococcus aureus survival in live cells
用于研究金黄色葡萄球菌在活细胞中存活的 SERS 纳米针系统
  • 批准号:
    10259897
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A SERS nanoneedle system for studying Staphylococcus aureus survival in live cells
用于研究金黄色葡萄球菌在活细胞中存活的 SERS 纳米针系统
  • 批准号:
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