Development of precision goniometer compatible with oxygen atmosphere and ultrahigh temperature for surface analyses of pulsed laser deposition oxide thin films

这项研究的目标是开发一种精密测角仪，它可以在从特高压到大气压的任何给定氧压的环境中处理样品，在超过1000℃的高温下，没有任何磁场噪声，如果样品通过电流加热会引入任何磁场噪声。因此，我们选择了激光作为热源，在第一年，我们研制了简单的加热台和光学装置，用一束连续的激光实现了1400℃的最高加热温度。在第二年，设计和制造了特殊的光纤和光学元件，以适应这项技术的六轴运动的测角仪。使样品台在高温下平稳旋转的轴承是这项研究中最困难的部分。最后，我们可以制作出具有所建议规格的测角仪。

The goal of this study is to develop a precise goniometer which can handle the specimen in an environment of any given oxygen pressure from UHV to atmospheric pressure at an elevated temperature of over 1000℃ without any magnetic field noise which would be introduced if the specimen is heated by electric current. Therefore, we chose laser beam as a heat source, In the first year, we have developed simple heating stage and optics for using a cw Nd:YAG laser beam to accomplish highest heating temperature of 1400℃. In the second year, special optical fiber and optics were designed and fabricated to fit this technique to a goniometer having 6-axis motion. The bearings which allow the sample stage to rotate smoothly at high temperature was the most difficult part of this study. Finally, we could fabricate the goniometer having the proposed specification.