Research on a New-Type Vibratory Gyro Sensor Using a Single Resonance Mode

提出了一种仅使用单谐振模的新型音叉式振动陀螺作为高稳定度角速率传感器，并对其进行了有限元分析。此外，实验证实该结构是一种角速度传感器。主要结论如下：(1)该结构可以支撑在底座两侧重心线上的两部分上，因此几乎不受外界振动的影响。(2)在不锈钢机体的情况下，支撑部分的固定对谐振频率的变化率很小，仅为5.2ppm。(3)计算了以压电陶瓷作为驱动和检测的结构的电阻抗，与实测值基本吻合。(4)测量了陀螺特性，由于等效电路计算的陀螺特性与实际测量的陀螺特性不同，必须逐一考虑这一原因，如果使用压电单晶，这种结构将成为非常小的角速度传感器。在需要宽频响特性的情况下，电感元件应与检测侧并联。对这一案例进行了详细的研究，并在文中进行了介绍。

A new-type tuning fork vibratory gyro that uses only a single resonance mode is proposed as a high stable angular rate sensor, and is analyzed by the finite element method. Furthermore, it is experimentally confirmed that the structure operates as an angular rate sensor. The conclusions are summarized as follows.(1) The structure can be supported at two parts of both sides of the base part on the line of the center of gravity, and therefore is hardly influenced by the vibrations from the outside.(2) The change rate of the resonant frequency by the fixation of the support parts is small with 5.2ppm in the case of the stainless steel body.(3) The electrical impedance of the structure with piezoelectric ceramics for the drive and also detection is calculated, and almost agrees with the measured one.(4) The gyro characteristics are measured, and the operation as an angular rate sensor is confirmed.(5) As the gyro characteristics calculated by the equivalent circuit differ from the measured ones, this reason must be considered in succession.This structure will become a very small angular rate sensor, if a piezoelectric single crystal is used. An inductance element should be connected in parallel with the detection side, in the case that the wide frequency response characteristic is required. This case is studied in detail and is presented in the paper.