Development of high precise coordinate measurement system using piezo-drive high-speed scanners

作为三维坐标测量的第一步，单自由度粗动单元是为大范围一维坐标测量而研制的。利用该粗动单元制作了测量系统，并在一维坐标系下对系统的测量精度进行了测试。然后，在本研究中首先进行了角隅棱镜的特性评价。确认了激光束分散和时间边缘部分的强度降低。使用该结果，对隅角棱镜进行不使用该部门的镜控制。接着，将距离L校正为镜像和目标。实验证明，在L=1000mm左右，标定误差为0.35mm（0.035%）。并且，校准了设置中的激光束方向。跟踪站坐标的旋转由坐标测量机的绝对坐标得到。利用该测量系统进行了宽XY平面内的二维空间坐标测量。为激光跟踪粗精站三维空间坐标测量的实际应用提供了可能性。

As the first of all step of 3-D coordinates measurement, the one degree of freedom coarse motion unit was developed for one dimensional coordinate measurement in a wide range. Measurement system using the coarse motion unit was made and measuring accuracy of the system was done in one dimensional coordinate. Then, characteristic evaluation of corner cube was carried out first of all in this study. The following was confirmed : laser beam dispersion and lowering of the strength at time edge portion. Using this result, mirror control, which did not use the department, was conducted in respect of corner cube. Next, distance L was proofreaded to mirror and target. It was proven that the calibration was possible in 0.35mm error (0.035%) for about L=1000mm. And, the laser beam direction in the setting was calibrated. The rotation of the tracking station coordinate was obtained from the absolute coordinate of the coordinate measuring machine. Therefore the possibility of relative position identification method in using two tracking stations by this was found. Two-dimensional spatial coordinate measurements in the wide XY plane using this measuring system were carried out. The possibility of the practical application of three dimensional space coordinate measurement using the coarse and fine motion laser tracking station was found.