10nm-orderd 33D structures for bio-mechanical handling

本研究开发了三维纳米结构的制造技术，目的是将用于固定、操作和分析微小生物物质的工具细化到10nm量级。我们将三维纳米结构分为针状、管状和颗粒状结构。为了加热针状结构，我们开发了电子束沉积（EBD）方法，利用扫描电子显微镜的光束进行积碳。结果表明，采用EBD法在玻璃针尖的φ20nm键状探针形式，在疏水底物上拉长的单个λ - dna分子的一部分是可逆的。此外，通过EBD方法，在原子孔径显微镜的悬臂顶端形成纳米尺寸的针，并将其应用于扫描近场光学显微镜的散射探针。通过观察φ20nm晶圆和φ200nm晶圆混合的样品，采用长度为1微米的φ10nm非晶碳针作为散射探针，可以获得φ200nm晶圆附近φ20nm晶圆的光学图像，这是传统散射探针无法获得的。为了制造管状结构，我们使用了精细的玻璃管和聚焦离子束。可生产直径约500nm的管状结构孔。进一步开发了利用这种管状结构产生颗粒状细结构的系统。利用压电元件将上述管状结构（细移液器）上下驱动，在玻璃基板上形成约φ1微米的液滴并形成凝胶。此外，研究还表明，这种液滴被包裹在一个囊内，它可以应用于植物细胞的转化。

In this research, fabrication technology of the 3-dimensional nano structure was developed for the purpose of making detailed the tool which is used for fixing, operating and analyzing a minute living body substance to 10nm order We classified the 3-dimensional nano structure into shape of needlelike, tubular and granular structure.To febrieate needlelihe structures, we developed the electron beam depositing (EBD) method which make carbon deposit using the beam of the scanning electron microscope. It was shown that using the φ20nm key-like probe forme at the tip of a glass needle by the EBD method, a part of single lambda-DNA molecule elongated on the hydrophobic substrate is reroverable. Moreover, by the EBD method, the needle of nano meter size was formed at the tip of a cantilever of an atomic foroe microscope, and this was applied to the scattering probe of a scanning near-field optical microscop. As a result of observing the sample in which the φ20nm bead and the φ200nm bead were intermingled, the scattening probe, which was φ10nm needle of amorphous carbon with a length of 1 micrometer, could obtain the optical image of the φ20nm bead near the φ200nm bead that was not obtained by the conventional scattering probe.To fabricate tubular structures, we used detailed glass pipe and focused ion beam. Tubular structure of about 500nm of bores can be produced. Moreover, the system which generates the granular fine structure, using this tubular structure further was developed. The above-mentioned tubular structure (detailed pipet) was driven up and down using the piezo-electric element, and the system which form and gelates about φ1 micrometer droplets on a glass substrate was developed. Moreover, it was shown that a gnen is enclosed which this droplets and it can apply to the capsule for the transformations of a plant cell.