System Construction and Execution for the expansive upgrading of the practice Education in the College of Technology

本研究旨在将教学与科研相结合，通过辉光放电实验进行电磁场的实践教学和基本过程研究。利用“电磁场综合实验装置”进行了主要的实验研究，并将其推广到综合研究，取得了以下成果和认识。本研究针对大学课程中的电学基础、电磁场、气体与固体电子学、电子特性、计算机硬件/软件等领域进行综合性的研究。平行板电场中气体电离过程的实验研究。对辉光放电等离子体产生过程中的电场、电位和放电电流进行了测量和分析。研究了含氮氧化物气体的混合气体等离子体的产生过程和行为，作为净化大气污染的基础研究。以N_2、O_2和N_2/O_2混合气体为实验气体，对辉光放电的建立特性进行了相关测量。利用四极杆质谱仪对气体压强随时间的变化进行了测量和可见光光谱分析，获得了放电初期放电电流与分压、可见光辐射谱之间的相关性的新认识。在电容耦合型射频等离子体发生器中，通过电路分析、电相位测量等方法对电源进行了优化。这项研究是由技术学院、另一所大学、毕业研究实验室、高级课程特别研究合作进行的，上述结果到处都有报道。

This study aimed to couple education and research and carried out the practical education and the basic process research on an electromagnetic field through a glow discharge experiment. The main experiment and research was performed by using "the electromagnetic field integral experiment equipment", and it was promoted for the synthetic research, and following results and knowledge were obtained. In this study, the following are comprehensively intended in fields such as electricity base, electromagnetic field, gas and solid-state electronics, electronic property, computer hardware/software in the collage curriculum. The experiment and research of gas ionization process in parallel plate electric field. Electric field in generating process of glow discharge plasma, potential and the discharge current were measured carried out and analyzed with a computer method. Generating process and behavior of mixed gas plasma including the NOx gas were pursued as the basic research for air pollution purification. N_2, O_2 and N_2/O_2 mixed gas were used for test gases and correlation measurement of the build-up characteristics of glow discharge were carried out. A new knowledge on the correlation between discharge current and partial pressure, visible radiation spectrum in the discharge initial stage was obtained by measurement and visible light spectrometry of gas pressure with time change, in which the quadrupole mass spectrometry was applied for the measurements. In the capacitive coupling type RF plasma generation, the electric power optimization was attempted by electric circuit analysis, electric phase measurement. The research was performed by the cooperation between technical college, another university, laboratory for graduation research, special research in the advanced course and the above results were reported everywhere.