Development of Supersonic Free-Jet PVD with nano-sized culsters

采用超音速自由射流PVD （SFJ-PVD）沉积纳米团簇，制备了Ti-Al和TiN纳米复合涂层。作者开发了SJF-PVD作为一种新的涂层方法，该方法通过在衬底上以非常高的速度沉积纳米团簇形成涂层。纳米团簇的高速是由惰性气体的超声速气流产生的。气体流动由蒸发室和沉积室之间的压力差产生，并通过特殊设计的超音速喷嘴加速到超音速（3.6马赫）。在基材和涂层之间的界面以及涂层内部形成光滑、致密和无缺陷的微观结构。Ti-Al和TiN涂层的显微组织具有非常细的晶粒尺寸。用纳米压痕硬度计证实，Ti/Ti- al和Ti/TiN分级涂层的硬度随成分的分级而分级。

Ti-Al and TiN nano-composite coatings are prepared by depositing nano-clusters with supersonic free-jet PVD (SFJ-PVD). The authors have developed SJF-PVD as a new coating method in which a coating film is formed by depositing nano-clusters with very high velocity onto a substrate. The high velocity of nano-clusters is produced by the supersonic gas flow of inert gas. The gas flow is generated by pressure difference between evaporation and deposition chambers and accelerated to supersonic velocity (Mach 3.6) by specially designed supersonic nozzles. A smooth, compact and defect-free microstructure is formed both at the interface between substrates and coating films and inside the coating films. The microstructures of Ti-Al and TiN coatings have very fine grain size. It is confirmed with nano-indentation hardness tester that graded coatings of Ti/Ti-Al and Ti/TiN have graded hardness corresponding to the graduation of composition.