Application of Supersonic Free-Jet PVD applied to Nano-structure Coating

超音速自由喷射PVD在纳米结构涂层中的应用

• 批准号: 16360368
• 负责人: NIWA Naotake
• 金额: $ 8.26万
• 依托单位: Kogakuin University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2006
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16360368/
• 关键词: Nanoparticle; Nano-composite; Coating; Supersonic gas flow; 組織制御; 硬質膜

Recently, requirements for structural materials become increasingly severe. A coating process is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have following major technical problems. We develop Supersonic Free-Jet PVD (SFJ-PVD) as a new coating process to solve the problems. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of "gas evaporation" and "vacuum deposition". In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated through a specially designed supersonic nozzle at the supersonic flow of 4.2 Mach, number. With SFJ-PVD, We produce metal films and ceramic films that have smooth, compact and defect-free microstructure both in the film and at the interface between the substrate and the film and excellent adhesive strength to the substrate.

近年来，对结构材料的要求越来越高。涂层工艺是实现这些要求的最有前途的方法之一。然而，常规的涂覆方法通常具有以下主要技术问题。我们开发了超音速自由喷射PVD（SFJ-PVD）作为一种新的涂层工艺来解决这些问题。SFJ-PVD是利用超音速气流来存款纳米颗粒并形成没有裂纹或空隙的厚涂膜的技术。该方法由“气体蒸发”和“真空沉积”组成。在气体蒸发室中，在惰性气体气氛中蒸发源材料以形成纳米颗粒。然后在沉积室中用惰性气体流通过转移管将纳米颗粒运送到衬底。气体流由腔室之间的压力差产生，并通过专门设计的超音速喷嘴在4.2马赫数的超音速流下加速。通过SFJ-PVD，我们生产的金属薄膜和陶瓷薄膜在薄膜内部和基材与薄膜之间的界面处都具有光滑、致密和无缺陷的微观结构，并且与基材具有优异的粘合强度。

项目成果

超音速フリージェットPVDによる傾斜組成皮膜の形成

超音速自由喷射PVD形成梯度复合膜

• 发表时间: 2005
• 期刊: 傾斜機能材料論文集
• 作者: 湯本;山本;廣木;塩田;丹羽
• 通讯作者: 丹羽

Formation of Graded Coatings by Supersonic Free-Jet PVD (in Japanese)

通过超音速自由喷射 PVD ​​形成梯度涂层（日语）

• 发表时间: 2005
• 期刊: FGM 2005
• 作者: Atsushi Yumoto;Fujio Hiroki;Ichiro Shiota;Naotake Niwa
• 通讯作者: Naotake Niwa

Fabrication of Nanostructure Composites in Functionally Graded Coatings with Supersonic Free-Jet PVD

• DOI: 10.4028/www.scientific.net/msf.492-493.341
• 发表时间: 2005-04
• 期刊: Materials Science Forum
• 作者: A. Yumoto;Takahisa Yamamoto;F. Hiroki;I. Shiota;N. Niwa

燐酸カルシウム粒子分散チタン膜

磷酸钙颗粒分散钛膜

• 发表时间: 2007

Nano-Composite Coatings by Supersonic Free-Jet PVD

超音速自由喷射 PVD ​​纳米复合涂层

• 发表时间: 2004
• 期刊: Trans.of the Mater.Res.Soc.Jpn 29
• 作者: A.Yumoto;T.Yamamoto;F.Hiroki;I.Shiota;N.Niwa
• 通讯作者: N.Niwa