Development of Fiber Reinforced Titanium Matrix Composite material by Gas Deposition Method

纤维增强金属（FRM）是改善金属材料力学性能的候选材料，但金属基体与纤维之间的反应难以控制。本研究旨在评价气相沉积法（GDM）作为制备钛基FRM的实用方法。在GDM中，材料在惰性气体气氛中蒸发形成的超细颗粒进入高真空室沉积到基材上，沉积率高。GDM使超细颗粒具有较高的动能，可制成高密度的厚膜。由于它不具有凝固过程，可以控制金属基体与纤维之间的反应。1997年，我们研究了加热条件、惰性气体流量、蒸发室和沉积室间压力差对蒸发和沉积的影响。阐明了仪器控制参数与沉积速率的关系。1998年，我们制作了钛基FRM并对其进行了评价。本研究的结果如下：1。沉积钛与钛基体之间的黏结力高。2 .通过改进排出多余颗粒的系统，使超细颗粒的分散性变小。超细颗粒尺寸的分散对沉积金属与纤维之间的黏聚力有影响。研究结果表明，应用GDM技术生产FRM的关键技术是三维高精度地控制颗粒粒度分布和沉积系统（衬底阶段和喷嘴）。

FRM(Fiber Reinforced Metal) is a candidate to improve the mechanical properties of metallic materials, however, It is difficult to control the reaction between metallic matrix and fibers.This study aimed to evaluate Gas Deposition Method (GDM) as a practical method to produce titanium matrix FRM.In GDM, ultrafine particles formed by evaporating materials in inert gas atmosphere move Into high vacuum chamber and deposit to substrate with high deposit rate.GDM gives high kinetic energy to ultrafine particles and can make thick film with high density. As ft does not have solidification process, it can control the reaction between metallic matrix and fibers.In 1997, we made study on the effects of heating condition, flow rate of Inert gas and difference of pressure between chambers of evaporation and deposition.We elucidated the relation between control parameters of the apparatus and deposit rate.In 1998, we made titanium matrix FRM and evaluated them.The results of this study are as follows.1. The cohesion between deposited titanium and titanium substrate Is high.2. Dispersion of ultrafine particle size becomes small, by Improving the system that exhausts surplus particles.3. The dispersion of size of ultrafine particle has the effect on the cohesion between deposited metal and fiber.We conclude that key technology to apply GDM for producing FRM is to control particle size distribution and the deposit system (substrate stage and nozzle) three-dimensionally In high accuracy.