Development of Ultra-fine particle Depositon Method to Overlay Coating

超细颗粒沉积法堆焊工艺的发展

• 批准号: 11650723
• 负责人: NIWA Naotake
• 金额: $ 1.73万
• 依托单位: Kogakuin University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-11650723/
• 关键词: coating; titanium; aluminum; ultra-fine partticle; 構造材料; 超音速ノズル; ガス中蒸発法

This study proposed the development of Ultra-fine Particle Deposition Method (UDM) as new coating technology for structural materials. UDM is proposed as a technique for handling ultra-fine particles. There are two physical stages in UDM : gas evaporation and vacuum deposition. During gas evaporation, the source material is evaporated to form ultra-fine particles in an inert gas ; ultra-fine particles are carried with the inert gas in carrier pipe by using gas flow issuing from pressure difference between evaporation chamber and the deposition chamber. In the deposition stage, the particles are deposited with the gas flow by nozzle joined the carrier pipe tip on the substrate in deposition chamber.We considered that carrier speed of ultra-fine particles deposited as controlling factor of film formation in this method. It is effective that gas flow velocity is accelerated in order to accelerate carrier speed of ultra-fine particles. Then supersonic nozzle in which gas flow velocity was supersonic jet accelerated was designed by assumption of one-dimensional isentropic flow in nozzle, and it was designed in Mach 3.6 in the nozzle exit.This study aims to form the metal films of pure titanium and aluminum by UDM using supersonic nozzle. The results obtained are as follows : (1) Removal of coarse particles formed by secondary agglomeration is necessary for producing metallic films of titanium and aluminum. (2) Growth rate of film is controlled by electric power to evaporate source metal. (3) Heating nozzle is effective for the formation of film without voids. (4) No cracks were formed by indenting the diamond indenter of micro Vickers hardness tester at the interface between substrate and coated film, which indicates strong adhesion between them. By the result of this study, the name of this method was changed from the Ultra-fine Particle Deposition Method to Supersonic Free-Jet PVD Method.

本研究提出开发超细颗粒沉积法（UDM）作为结构材料的新型涂层技术。 UDM 被提议作为一种处理超细颗粒的技术。 UDM 有两个物理阶段：气体蒸发和真空沉积。气体蒸发时，原料在惰性气体中蒸发形成超细颗粒；利用蒸发室和沉积室之间的压差产生的气流，将超细颗粒携带在输送管中的惰性气体中。在沉积阶段，颗粒通过连接在沉积室中的载流管尖端的喷嘴随气流沉积在基板上。我们认为超细粒子沉积的载流速度是该方法中成膜的控制因素。为了加快超微粒子的输送速度，提高气体流速是有效的。然后根据喷嘴内一维等熵流的假设，设计了气体流速被超音速射流加速的超音速喷嘴，并在喷嘴出口设计马赫数为3.6。本研究旨在利用超音速喷嘴采用UDM技术形成纯钛和纯铝金属薄膜。所得结果如下： (1)去除二次团聚形成的粗颗粒对于生产钛和铝金属薄膜是必要的。 (2)通过电力控制薄膜的生长速率以蒸发源金属。 (3) 加热喷嘴对于形成无空隙的薄膜是有效的。 (4)用显微维氏硬度计的金刚石压头压入基体与涂膜的界面处，未出现裂纹，表明两者之间具有较强的附着力。根据本研究的结果，该方法的名称从超细颗粒沉积法更改为超音速自由喷射PVD法。

项目成果

A.Yumoto,F.Hiroki I.Shiota and N.Niwa: "Application of Ultra-fine Particle Deposition Method to Overlay Coating"MASS AND CHARGE TRANSPORT IN INORGANIC MATERIALS 'Fundamentals to Devices'. 991-998 (2000)

A.Yumoto、F.Hiroki I.Shiota 和 N.Niwa：“超细颗粒沉积方法在覆盖涂层中的应用”无机材料中的质量和电荷传输“器件基础”。

A.Yumoto,F.Hiroki,I.Shiota and N.Niwa: "Application of Ultra-fine Particle Deposition Method to Overlay Coating"MASS AND CHARGE TRANSPORT IN INORGANIC MATERIALS 'Fundamentals to Devices'. 991-998 (2000)

A.Yumoto、F.Hiroki、I.Shiota 和 N.Niwa：“超细颗粒沉积方法在覆盖涂层中的应用”无机材料中的质量和电荷传输“器件基础”。

A.Yumoto, F.Hiroki, I.Shiota and N.Niwa: "Application of Ultra-fine Particle Deposition Method to Overlay Coating"MASS AND CHARGE TRANSPORT IN INORGANICMATERIALS Fundamentals to Devices. 991-998 (2000)

A.Yumoto、F.Hiroki、I.Shiota 和 N.Niwa：“超细颗粒沉积方法在覆盖涂层中的应用”无机材料中的质量和电荷传输器件基础知识。