Three Dimensional Imaging System by Slicing with a Tool Wire

在本研究中，我们开发了一种用于电火花加工和表面磨料加工复合加工的多功能送丝装置。利用进给丝作为工具，可以在小反力作用下对SEM观察样品进行电火花加工成型，也可以在同一台机器上进行磨料加工。由于工件不会从初始阶段移除，因此保证了加工精度。本机在两个滑轮的中心装有一个可移动的导丝器，可进行磨丝加工。通过使用导丝器，可以在没有丝振动的情况下进行表面磨料加工。在线材电火花加工过程中，用于线材磨料加工的导丝器，用于在线材磨料加工过程中设定切割深度。由于总是提供新的焊丝，因此可以忽略电极磨损的影响，从而保证精度。对观察材料进行电火花线切割五面加工后，采用磨料加工去除表面形成的放电坑。利用能量色散x射线能谱法（EDS）对试样的材料分布进行了三维观察。我们应用磨料表面加工钨铜（W-Cu）和铸铁。讨论了通过重复磨削过程进行三维材料分布的可行性。

In this research, we developed a multi functional wire feeding device for combined machining of electrical discharge machining (EDM) and surface abrasive machining. By using a feeding wire as a tool, a sample for SEM observation can be shaped by EDM under small reaction force and can be finished by abrasive machining on the same machine. Machining accuracy is guaranteed since the work-piece is not removed from the initial stage. This machine equips a movable wire guide in the center of two pulleys which enables wire abrasive machining. By using the wire guide, surface abrasive machining can be performed without wire vibration. The wire guide for wire abrasive machining withdraws in the process of wire EDM and it is used to set the cut of depth when the abrasive machining is in process. The influence of the electrode wear can be disregarded because a new wire is always supplied, thus accuracy can be guaranteed. After five sides machining to the materials being observed was carried out by wire EDM, abrasive machining was used to remove the electrical discharge craters formed on the surface.Repetitive surfacing leads to 3 dimensional observation of materials distribution of a specimen by energy dispersion X-ray spectrometry (EDS). We applied abrasive surface machining to tungsten-copper (W-Cu) and cast iron. We discuss the feasibility of 3-D materials distribution by SEM through the repetitive grinding process.