Development of continuous flowing high density plasma source in the atmospheric pressure?

微空心阴极放电（MHCD）是一种很有前途的产生常压辉光等离子体的方法。为了产生三维大体积常压辉光等离子体，需要对微阴极持续放电进行并行操作。在本研究中，我们演示了平板和圆柱几何形状下的平行MCS放电，如下：1 .稳定并联MHCD的演示比较几种介质材料（云母、特氟龙、FR-4）的MHCD电流-电压特性，使用FR-4的MHCD电极寿命长，放电电流范围宽，超过100ma。从MHCD电极向MCS放电区域注入大量等离子体，证明MCS放电的击穿电压和维持电压是由MHCD电流值控制的。在此条件下，平板电极和圆柱形电极的平行MCS放电非常适合于连续气体处理应用。

The micro hollow cathode discharge (MHCD) is a promising one to generate a atmospheric pressure glow plasma. And, to produce 3-dimensional large volume and atmospheric pressure glow plasma, parallel operations of the micro-cathode sustained (MCS) discharge is required. In this study, we demonstrated parallel MCS discharges in flat plate and cylindrical geometries, as follow,1: Demonstration of stable parallel MHCD Comparing current-voltage characteristics of MHCD of several dielectric materials (mica, Teflon, FR-4), MHCD electrode using FR-4 has a long lifetime and wide discharge current range over 100mA.2: Resolving operating conditions of parallel MCS discharge Injecting large amount of plasma from MHCD electrodes to MCS discharge region, the break down and the sustaining voltages of MCS discharge is demonstrated to be controlled by the current value of MHCD. And using these conditions, parallel MCS discharges of flat plate electrodes, furthermore cylindrical shaped electrode which suites well for the continuous gas treatment applications.