Three-dimensional elemental mapping by using spatially-resolved glow discharge optical emission spectrometry

利用原子发射光谱成像光谱仪系统测量了辉光放电等离子体的二维发射图像。来自具有直径为8mm的中空阳极的辉光放电灯的发射信号通过准直器光学器件传导到成像光谱仪（Model 12580，BunkoKeiki Corp.）的入口狭缝上，然后将发射图像分散并在CCD检测器（SensiCam QE Model，PCO Imaging Corp.）上检测。可以获得锌样品在Zn I 334.50 nm处的发射图像和铜样品在Cu I 324.75 nm处的发射图像。它们的发射强度在等离子体区域的径向方向上是不均匀的，但在离中心区较远的地方变得较弱。二维分布将由等离子体的激发效率的空间变化引起。当采用镀锌钢板和热沉积铜膜作为样品时，还观察到发射图像的时间变化。从相应的图像估计的这些表面层的深度剖面表明，空间分辨的测量可以提供具有良好精度的数据。

An imaging spectrometer system was employed to measure two-dimensional emission images from a glow discharge plasma in atomic emission spectrometry. Emission signals from a glow discharge lamp having a hollow anode of 8 mm in diameter were conducted through a collimator optics onto the entrance slit of an imaging spectrograph (Model 12580, BunkoKeiki Corp.), and the emission image was then dispersed and detected on a CCD detector (SensiCam QE Model, PCO Imaging Corp.). The emission images at Zn I 334.50 nm for a zinc sample and at Cu I 324.75 nm for a copper sample could be obtained. Their emission intensities were not uniform in the radial direction of the plasma region but became weaker at larger distance from the central zone. The two-dimensional distribution would result from a spatial variation in the excitation efficiency of the plasma. Temporal variations in the emission images were also observed when a zinc-coated steel plate and a thermally-deposited copper film were employed as the sample. Depth profiles of these surface layers estimated from the corresponding images indicated that a spatially-resolved measurement could provide the data with good precision.