Generation of Implantable Piezoelectric Thin Film for Hybrid Actuator and Enzyme Fuel Cell Battery

本研究利用一种新开发的生物相容性材料MgSiO_3（MSO）制备了一种可植入的压电薄膜，用于混合驱动器和酶燃料电池。我们获得了下述结果。(1)采用射频磁控溅射法制备了多层MSO薄膜。它具有高度定向的晶体结构。(2)制作了一种用于生物MEMS器件的单晶型驱动器，该驱动器将被植入人体。实验结果表明，该驱动器能够输送水和血清。(3)通过捕获葡萄糖产生酶电池。但是，该电源不足以使生物MEMS器件工作。MSO悬臂梁式发电系统研制成功。

In this study, an implantable piezoelectric thin film by using a newly developed biocompatible material MgSiO_3 (MSO) for hybrid actuator and enzyme fuel cell battery was generated. We obtained below described results. (1) A multi layered MSO film was generated by RF magnetron sputtering apparatus. It has highly oriented crystal structure. (2) A monomorph type actuator for Bio-MEMS devices, which will be implanted in the human body, was fabricated. It was confirmed that this actuator could transport water and blood serum. (3) An enzyme cell battery by trapping the glucose was generated. But the power was not enough for operate the Bio-MEMS device. MSO cantilever type electric power generation system was successfully generated.