Development of Ultraprecise Positioning XY Table Composed of Pneumatic Servo Bearing Actuators

提出并研制了一种用于超精密定位的新型气动伺服轴承驱动器。该执行器主要由气动伺服阀和气体静压推力轴承组成。它克服了刚度低、响应差等缺点。我们确定的原型驱动器与球面轴承的最小定位分辨率为2 nm。作为气动伺服球轴承驱动器的实际应用，研制了由六个气动伺服球轴承驱动器组成的超精密X-Y工作台样机。结果，我们确认了即使没有任何反馈控制，X-Y平台的最小定位分辨率也约为10 nm。

We proposed and developed 'pneumatic servo bearing actuator' as a new actuator for ultraprecise positioning. This actuator mainly consisted of a pneumatic servo valve and an aerostatic thrust bearing. It overcame some demerits such as low stiffness and poor response. We confirmed the minimum positioning resolution of the prototype actuator with spherical bearing was 2 nm. As a practical application of the pneumatic servo spherical bearing actuator, a prototype of ultraprecise X-Y stage which consisted of six pneumatic servo bearing actuators was developed. As a result, we confirmed the minimum positioning resolution of the X-Y stage was about 10 nm even without any feedback controls.