Formation of lower order cluster molecules by a precise control of low energy electron plasma

为了精确控制低电子能量等离子体，新开发了气流型等离子体，并对等离子体中连续进行的低阶星团形成过程进行了详细的测量。阐明了金属氧化物团簇反应形成纳米颗粒和纳米棒的机理。并对碳聚合反应的初始过程进行了研究。阐明了氧对聚合反应的干扰作用。阐明了低阶簇分子形成纳米颗粒的机理。

For a precise control of low electron energy plasma, gas stream-type plasma was newly developed, and the formation process of low order clusters, which proceeded continuously in plasma, was measured in detail. Formation mechanism of nanoparticles and nanorods through the reaction among the metal oxide clusters were clarified. Moreover, the initial process of the carbon polymerization reaction was investigated. The role of the oxygen, which disturbed polymerization reaction, was also clarified. Formation mechanism of nanoparticles through low order cluster molecules was elucidated.