Development of guided-wave optical sensors with a micromechanical structure and its design support system

为了建立具有微机械结构的导波光学传感器的设计指南，通过理论和实验检验确定了灵敏度与波导位置、膜片尺寸等因素的关系。此外，考虑到导波光传声器中压缩膜空气阻尼的影响，发现阻尼率随着气膜厚度的减小而增大，这与粗略的理论预测类似。此外，对于导波光学压力和流量传感器，基于我们对每个传感器的理论和实验结果，开发了桌面和Web应用程序来设计波导和膜片。

In order to establish design guidelines for guided-wave optical sensors with a micromechanical structure, sensitivity dependences on waveguide position, diaphragm dimensions and so on were determined by theoretical and experimental examinations. Also, regarding an effect of squeeze-film air damping in guided-wave optical microphones, damping ratio was found to increase as air-film thickness decreased, similar to the rough theoretical prediction. Moreover, for guided-wave optical pressure and flow sensors, desktop and web applications to design waveguide and diaphragm were developed, based on our theoretical and experimental results of each sensor.