Development of an Inchworm-type 6-DOF Positioning Device

尺寸器是一种具有无限工作面积和小位移的装置。一种压电致动器(压电体)可实现1微米或更小的变形。为了制造自由曲面，需要六自由度(6-DOF)定位装置，直线运动需要三自由度，转动需要三自由度。所开发的定位装置是基于尺寸虫的六足动物。它由六个压电片和六个电磁铁组成。六足结构中的直线滑块被堆叠式压电片所取代。在两个压电体之间放置了六个电磁铁。底部的三个电磁铁接触底座，另外三个电磁铁支撑着一个平台。倾斜运动是通过半球平台实现的。电磁铁的激励和压电体的变形由所需的运动决定。获得了5um的线性位移和1.3mrad的倾斜度。当施加40 g载荷时，角度减小到0.6 mrad。负载特性依赖于电磁力。

An inchworm is a device which has unlimited working area with small displacement. A piezoelectric actuator (piezo) realizes one micron or smaller deformation. In order to manufacture free-form surface, six degree-of-freedom (6-DOF) positioning device is required; 3-DOF for linear motion and 3-DOF for rotational motion. The developed positioning device is an inchworm based hexapod. It consists of six piezos and six electromagnets. The linear slides in the hexapod are replaced by the stacked-type piezos. Six electromagnets are placed between two piezos. Three electromagnets at the bottom touch the base, and the other three support a platform. Tilt motion is obtained by a hemisphere platform. The electromagnets' excitation and the piezos' deformation are determined by the desired motion. The 5 um linear displacement and 1.3 mrad tilt were obtained. The angle reduced to 0.6 mrad when the 40 g load is applied. The load characteristic depended on the electromagnetic force.