Accurate process planning of MEMS devices using multi-resolution mesh models

这项研究的目的是使不一定是MEMS(微电子机械系统)制造工艺专家的设计师能够轻松地规划出可行的、低成本的MEMS器件制造工艺。为此，开发了一个基于多分辨率网格模型的MEMS器件计算机辅助工艺规划系统原型，该原型系统可以搜索到所有可行的器件工艺方案，并且可以根据器件的多分辨率网格模型自动估计更容易制造的器件形状和结构。

The objective of this study is to enable designers who are not necessarily the experts on MEMS(Micro Electro Mechanical Systems) manufacturing processes to easily plan the feasible and low-cost manufacturing processes of MEMS devices. To achieve this, a prototype of the computer-aided process planning system of MEMS devices was developed where (1) all feasible process plans of the device could be searched for and (2) device shapes and structures easier to fabricate could be estimated automatically based on the multi-resolution mesh model of the devices.