Micro flow sensor based on the impedance of the electrical doubolelayer

我们提出了一种基于阻抗的流量传感器，它根据流量与电双层之间的相互作用来测量通过微通道的流量。使用FIB制作的电极芯片进行了几个实验。结果表明：(1)电流阻抗与流速近似成正比；(2)阻抗的实部和虚部表现出不同的变化规律；(3)两个分量的行为取决于水流与电场的夹角。

We proposed an impedeance based flow sensor which measures the flow velocitythrough a micro channel on the basis of the interactions between the flow and theelectrical double layer . Several experiments were performed using an electrode chipfabricated by FIB. The results showed the following: (1) the impedance of the electrodechanges in approximate proportion with the flow velocity , (2) the real and imaginarycomponent of the impedance shows a different change, (3) the behavior of the twocomponents depends on the direction angle between the flow and the electric field.