GLOVE PERMEATION BY SEMICONDUCTOR PROCESSING MIXTURES

溶剂通过手套的渗透和随后的吸收 通过皮肤可能代表了接触的重要途径 半导体微制造设施中使用的危险化学品。 众所周知，一种化学品的混合物通过 防护服通常比观察到的要快得多 混合物的纯成分。特别值得关注的是有机食品 含有乙二醇醚衍生物的溶剂混合物 公认的生殖危害，很容易通过 皮肤。我们建议研究几种材料的渗透阻力。 当用选定的液体混合物挑战时的手套材料 半导体制造中的光致抗蚀剂和溶剂配方 流程。 标准渗透试验方法ASTM F739-85将用于 测定手套材料的穿透时间和渗透率 来自几家制造商反对常见的工艺混合物和他们的 纯组件。测试将在25摄氏度和37摄氏度的条件下进行 C覆盖预期手套温度范围(即，从房间 体温与体温之比)。渗透行为的比较 将在纯成分和它们的混合物之间制造，不同 手套材料不同，厂家不同。这项研究的结果 将提供一种评估皮肤暴露于 危险过程化学品和建议的基础 半导体中手套的正确选择和使用方法 加工设施。

The permeation of solvents through gloves and subsequent absorption through the skin may represent a significant route of exposure to hazardous chemicals used in semiconductor micro fabrication facilities. It is well known that the permeation of a mixture of chemicals through protective clothing can often be much faster than that observed for the pure components of the mixture. Of particular concern are organic solvent mixtures containing glycol-ether derivatives which are recognized reproductive hazards that are readily absorbed through the skin. We propose to investigate the permeation resistance of several glove materials when challenged with selected liquid mixtures used as photoresists and solvent formulations in semiconductor manufacturing processes. The standard permeation test method, ASTM F739-85, will be used to determine breakthrough times and permeation rates for glove materials from several manufacturers against common process mixtures and their pure components. Tests will be performed at 25 degrees C and 37 degrees C covering the range of expected glove temperatures (i.e., from room temperature to body temperature). Comparisons of permeation behavior will be made between the pure components and their mixtures, different glove materials, and different manufacturers. The results of this study will provide a means for assessing the potential for dermal exposure to hazardous process chemicals and a basis for recommendations on the proper selection and use practices for gloves in semiconductor processing facilities.