SERVICE: MULTICHANNEL ELECTRODES & SILICON SUBSTRATE PROBES

用于实验的探针的制备并不以 它们从硅晶片上的最终蚀刻。 探头必须包装 并为特定应用做好准备。 目前正在努力 封装领域包括开发更高密度的连接器， 更坚固的布线系统和改进的标准化方案。 除了我们自己在所有这些领域的内部发展外， 还与俄勒冈州波特兰的PI医疗公司合作。 合作与 PI和我们的一些探针用户正在产生可用的系统， 正在产生所需的生理数据。 我们将继续 支持PI Medical从NIH获得的II期SBIR， 开发用户准备好的微探针组件。 我们还在努力 与几个小组进行了探针的后处理。 后处理 包括在探针被 从晶片上蚀刻下来以特定的方式提高它们的质量。 一种后处理方法是聚对二甲苯的沉积。 这是 由PI Medical和Coplanar Corp.完成。聚对二甲苯可以 用于提高探针柄的坚固性， 用于深插入的处理。 仅选择性消融的能力 在一个大的网站上的一个小面积的聚对二甲苯可以允许我们定制 探针从晶片上蚀刻后， 成本较低的事业。 另一种后处理方法是 沉积生物聚合物以影响组织对探针的反应。 这项工作是由密歇根大学的马丁博士完成的。 他 为华盛顿大学的海斯坦博士涂上了一些探针， 植入了蟾鱼的前庭神经

The preparation of probes for experimental use does not end with their final etch from the silicon wafer. The probes must be packaged and prepared for the particular application. Ongoing efforts in the area of packaging include development of higher density connectors, more robust cabling systems, and of improved standardization schemes. In addition to our own internal developments in all of these areas, we are also working with PI Medical in Portland, OR. Collaborations with PI and some of our probe users are resulting in usable systems which are producing the desired physiological data. We will continue to support PI Medical in their Phase II SBIR from the NIH for the development of user-ready microprobe assemblies. We are also working with several groups on the post-processing of probes. Post-processing involves the deposition of coatings on the probes after they have been etched from the wafer to improve their qualities in a specific way. One post-processing method is the deposition of parylene. This is being done by both PI Medical and the Cochlear Corp. Parylene can be used to improve the robustness of the probe shanks which permits their handling for deep insertions. The ability to selectively ablate only a small area of parylene on a large site may permit us to customize probes after they are etched from the wafer, a potentially simpler and less-costly undertaking. Another post-processing method is the deposition of biopolymers to influence tissue reaction to the probes. This work is being done by Dr. Martin at Univ. of Mich. He has coated some probes for Dr. Highstein of Washington University which have been implanted in the vestibular nerve of toadfish.