High Frequency, Large Aperture Ultrasound Transducer Arrays for Volumetric Ophtha

描述（由申请人提供）：拟议研究的目标是开发一种用于快速3-D眼科成像的高频、宽带、大孔径超声换能器。TRS提出使用光刻来限定微米级特征尺寸和化学蚀刻来微加工所需的换能器结构来制造高频压电超声换能器阵列。所提出的技术背后的关键创新是将单晶压电体与深反应离子蚀刻（DRIE）相结合，以制造具有压电性能的非常精细的换能器结构，甚至超过低频陶瓷基换能器。对于第一阶段，TRS将展示一个1-D，30 MHz，线性阵列换能器与带宽接近100%。在第二阶段，将开发一种具有仰角元件的线性阵列，用于快速体积扫描。该阵列也将被弯曲以匹配眼睛的表面。成功完成该计划将消除对机械扫描单元件传感器的需求，大大提高患者舒适度，减少扫描时间，并通过减少患者运动来提高3-D测厚图的准确性。宽带宽还将促进使用1个换能器的前部和后部成像。因此，该装置将改善眼科超声的性能，用于广泛的临床应用，包括通过透镜置换的白内障治疗、LASIK、眼内黑色素瘤表征、视网膜成像和青光眼测试。

DESCRIPTION (provided by applicant): The goal of the proposed research is to develop a high-frequency, broadband, large-aperture ultrasound transducer for rapid 3-D ophthalmic imaging. TRS proposes to make high frequency piezoelectric ultrasound transducer arrays using photolithography to define micron-scale feature sizes and chemical etching to micro-machine the desired transducer structure. The key innovation behind the proposed technology is the combination of single crystal piezoelectrics with deep reactive ion etching (DRIE) to make very fine scale transducer structures with piezoelectric properties that surpass even those of low-frequency, ceramic-based transducers. For Phase I, TRS will demonstrate a 1-D, 30 MHz, linear array transducer with a bandwidth approaching 100%. In Phase II, a linear array with elevation elements will be developed for rapid volumetric scanning. The array will also be curved to match the surface of the eye. Successful completion of this program will eliminate the need for mechanically scanned single element transducers greatly improving patient comfort, decreasing scan time, and improving the accuracy of the 3-D pachymetry maps through reduced patient motion. The broad bandwidth will also facilitate both anterior and posterior imaging with 1 transducer. The device will thus improve the performance of ophthalmic ultrasound for a broad range of clinical applications including cataract treatment by lens replacement, LASIK, intraocular melanoma characterization, retinal imaging and glaucoma testing.