Integration of micro-sensors with MEMS devices for microassembly and micromanipulation

近年来微机电系统（MEMS）的发展使其在交通、医药和卫生保健等领域的集成成为可能。MEMS补充并在某些情况下改进了传统器件。近年来，所谓的“生物mems”领域一直在稳步获得重要意义；它将MEMS技术与生物医学平台相结合。生物微机电系统领域最近的挑战源于对生物操作和微组装的需求。特别是，基于反馈传感器的操作是实现不同环境下微型物体高效可靠处理的必要条件。本研究探讨了嵌入式电容式梳状驱动传感器的MEMS器件的发展，目的是促进微组装，微操作和生物医学应用。在本研究中，将开发具有可重构能力的新型微型电容式梳状驱动传感器。提出的传感器将通过新颖的主动（供电）/被动闭锁机制重新配置。通过重新配置，这种传感器将获得现有传感器所缺乏的高灵敏度、大测量范围和良好的线性度。新型可重构静电线性梳状驱动器将被开发出来，这将降低传统同类产品所需的高驱动电压，从而使改进的梳状驱动器在未来与低压CMOS（互补金属氧化物半导体）电路集成成为可能。作为一个组成部分，原始的MEMS机制，如微探针，微组织/细胞微操纵器将被开发，并将研究拟议的传感器与这些设备的集成。本项目积累了集成MEMS传感器与其他单片制造MEMS器件的经验。所得结果对今后集成MEMS和CMOS信号调理电路的研究具有一定的参考价值。在项目的最后阶段，建议的设备将被纳入实际应用。该项目的成功将为MEMS集成、模块化和商业化铺平道路，并显著推动加拿大该领域的发展。

Recent development of Micro-Electro-Mechanical Systems (MEMS) has made it possible to integrate them in such fields as transportation, medicine and health care. MEMS complement and in some cases improve traditional devices. One particular area that has been steadily gaining significance in recent years is the field of so-called "Bio-MEMS"; it integrates MEMS technology with biomedical platforms. Recent challenges in the Bio-MEMS area stem from a need for biomanipulation and microassembly. In particular, feed-back sensor-based manipulations are necessary to realize efficient and reliable handling of micro-objects in different environments. This study investigates the development of MEMS devices with embedded capacitive comb-drive sensors with the objective of facilitating microassembly, micromanipulation and biomedical applications. In the proposed research novel micro capacitive comb-drive sensors with capability to reconfigure will be developed. The proposed sensors will be reconfigured by novel active (powered)/passive latching mechanisms. Through reconfiguration, such sensors will gain high sensitivity, large measurement range and good linearity (which existing ones lack). New reconfigurable electrostatic linear comb-drive actuators will be developed which will reduce the high drive voltage required by traditional counterparts and consequently make it possible to integrate improved comb-drive actuators with low voltage CMOS (Complementary Metal Oxide Semiconductor) circuits in the future.  As an integral part, original MEMS mechanisms, such as, microprobes, micro tissue/cell micromanipulators will be developed and integration of the proposed sensors with these devices will be studied. This project accumulates experience on integrated MEMS sensors with other monolithically fabricated MEMS devices. The results obtained will be valuable for the future research on integrated MEMS and CMOS signal conditioning circuits.  In the last stage of the project, the proposed devices will be incorporated into practical applications. The success of the project will pave the way to MEMS integration, modularization and commercialization and significantly advance the field in Canada.