Electronic characterization of composite materials for MEMS and nanoscale integration

微电子系统和器件的最新进展是由传统微电子不能直接提供的系统和功能的集成所驱动的。其中一个例子是微机电系统（MEMS）提供的功能，它可以用作信号处理系统中低功率频率参考和/或滤波的谐振结构。这种性质的发展在很大程度上依赖于对材料特性的单独理解，以及在自然界中找不到的组合——即将复合材料视为一种新型或“人造”材料。本提案将发展一种新兴的扫描探针显微镜技术（SPM），可以表征MEM结构的动态力学响应和成像材料的动态极化响应。这将包括设计和测试一种有源光子材料——一种可切换的设备，当被激活时，它可以在一个定义良好的“阻带”范围内抑制微波和毫米波信号。光子器件理论的发展将得到频闪SPM实验的支持，该实验可以对射频表面声波的影响进行成像。在进一步发展我们对人造材料动力学的理解的同时，这些研究将有助于增强MEM结构的测试，非机械光开关和设计表面声波滤波器的新方法。此外，定向制造研究中的新兴主题将探索分子电子接触形成时的电学特征，并与急性神经切片电生理学的合作研究联系起来，其中新的电极材料和片上系统电极设计将有助于加强这一重要的生物医学领域。本研究的跨学科和合作性质将为学生提供一个令人兴奋和有益的环境，让他们在从事具有实际和科学重要性的项目的同时发展他们的技能。

Recent advances in microelectronic systems and devices have been driven by the integration of systems and functionality that cannot be directly provided by conventional microelectronics. One example of this is the functionality provided by a micro-electro-mechanical system (MEMS) that can be used as a resonant structure for low-power frequency referencing and/or filtering in a signal processing system. Developments of this nature rely heavily on understanding material properties separately and in combinations not found in nature - i.e. treating a composite material as a novel or 'artificial' material.   This proposal will develop an emerging scanning probe microscopy technique (SPM) that can characterize the dynamic mechanical response of MEM structures and image the dynamic polarization response of materials. This will include the design and testing of an active photonic material - a switchable device that can reject microwave and millimeter wave signals in a well-defined "stopband" range when activated. Development of theory for the photonic devices will be supported by stroboscopic SPM experiments that can image the effects of radio-frequency surface acoustic waves. While further developing our understanding of the dynamics of artificial materials, these studies will contribute to enhanced testing of MEM structures, non-mechanical optical switches and new approaches to designing surface acoustic wave filters.   In addition, emerging themes in the study of directed fabrication using dielectrophoresis will explore the electrical character of molecular electronic contacts as they form - and link to collaborative studies in electrophysiology of acute neural slices where new electrode materials and system-on-chip electrode designs will help strengthen this important biomedical field.   The interdisciplinary and collaborative nature of this research will provide an exciting and rewarding environment for students to develop their skills while working on projects of practical and scientific importance.