Integration of micro-sensors with MEMS devices for microassembly and micromanipulation

近年来，微电子机械系统(MEMS)的发展使其在交通、医疗、医疗等领域的集成成为可能。MEMS是对传统设备的补充，在某些情况下还会改进传统设备。近年来，一个特别重要的领域是所谓的“生物微机械系统”领域；它将MEMS技术与生物医学平台相结合。生物微机械系统领域的最新挑战源于对生物操纵和微组装的需求。特别是，为了实现对不同环境中的微对象的高效和可靠的处理，基于反馈传感器的操作是必要的。本研究以微装配、微操作和生物医学应用为目标，研究了嵌入式电容梳状驱动传感器的MEMS器件的发展。在拟议的研究中，将开发具有可重新配置能力的新型微电容式梳状驱动传感器。建议的传感器将通过新的主动(供电)/被动锁存机制进行重新配置。通过重新配置，这种传感器将获得高灵敏度、大测量范围和良好的线性度(现有的传感器所缺乏的)。新型可重构静电线性梳状驱动器将被开发出来，它将降低传统驱动器所需的高驱动电压，从而使改进的梳状驱动器与未来的低电压CMOS(互补金属氧化物半导体)电路集成成为可能。作为一个组成部分，将开发原始的MEMS机构，如微探针、微组织/细胞微操作器，并将研究所提出的传感器与这些器件的集成。该项目在集成MEMS传感器和其他单片制造的MEMS器件方面积累了经验。所获得的结果将对未来集成MEMS和CMOS信号调理电路的研究具有参考价值。在项目的最后阶段，所提出的器件将投入实际应用。该项目的成功将为MEMS的集成化、模块化和商业化铺平道路，并极大地推动加拿大该领域的发展。

Recent development of Micro-Electro-Mechanical Systems (MEMS) has made it possible to integrate them in such fields as transportation, medicine and health care. MEMS complement and in some cases improve traditional devices. One particular area that has been steadily gaining significance in recent years is the field of so-called "Bio-MEMS"; it integrates MEMS technology with biomedical platforms. Recent challenges in the Bio-MEMS area stem from a need for biomanipulation and microassembly. In particular, feed-back sensor-based manipulations are necessary to realize efficient and reliable handling of micro-objects in different environments. This study investigates the development of MEMS devices with embedded capacitive comb-drive sensors with the objective of facilitating microassembly, micromanipulation and biomedical applications. In the proposed research novel micro capacitive comb-drive sensors with capability to reconfigure will be developed. The proposed sensors will be reconfigured by novel active (powered)/passive latching mechanisms. Through reconfiguration, such sensors will gain high sensitivity, large measurement range and good linearity (which existing ones lack). New reconfigurable electrostatic linear comb-drive actuators will be developed which will reduce the high drive voltage required by traditional counterparts and consequently make it possible to integrate improved comb-drive actuators with low voltage CMOS (Complementary Metal Oxide Semiconductor) circuits in the future.  As an integral part, original MEMS mechanisms, such as, microprobes, micro tissue/cell micromanipulators will be developed and integration of the proposed sensors with these devices will be studied. This project accumulates experience on integrated MEMS sensors with other monolithically fabricated MEMS devices. The results obtained will be valuable for the future research on integrated MEMS and CMOS signal conditioning circuits.  In the last stage of the project, the proposed devices will be incorporated into practical applications. The success of the project will pave the way to MEMS integration, modularization and commercialization and significantly advance the field in Canada.