A probe station compatible with a laser-vibrometer for advanced MEMS dynamic testing

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Recent development of Micro-Electro-Mechanical Systems (MEMS) has the potential to significantly boost the technological progress in such fields as transportation, telecom, multimedia, medicine and health care, etc. MEMS is destined to be a key driver technology for innovations in numerous applications with dramatic impact on a wide spectrum of industry, from automotive to biomedical engineering.    Prototype characterization and validation is of paramount importance in MEMS technology development. Simulation and design optimization of MEMS devices is insufficient and can produce invalid results as scaling issues, the unique characteristics of varying fabrication processes and the systems environment are not fully tested.  To obtain accurate performance information experimental testing of a device is the optimal approach. For MEMS testing, accessibility to micro scale components and the elimination of noise are the two essential factors. The applicant's research is targeted to develop MEMS devices for microasssembly and micromanipulations for biomedical applications.  Intensive experimental testing is required as a key part of the research.  The funding requested in this grant application will be used to purchase two pieces of equipment: a probe station and an anti-vibration table to support the applicant's research.  Successful experimental results will support and enhance the analytical modeling and design of novel MEMS devices, and consequently lead to the success of the research. This will pave the way to modularization and commercialization of biomedical MEMS devices and thus significantly advance the field in Canada.    The requested equipment will complement a CFI-awarded laser vibrometer. Seeking to increase the impact of CFI and NSERC investments, the applicant is in discussion with CMC Microsystems exploring the possibility of CMC enabling Canada-wide access to this Queen's-based equipment.  Such an arrangement would allow MEMS researchers across Canada to gain benefit from this capability and increase the opportunities for developing highly-qualified personnel in the area of MEMS test.