Focused ion beam tool for nanometer-scale fabrication and characterization

皇后大学的研究人员建议购买一个聚焦离子束工具（FIB），并在安大略省的金斯顿安装和运行。这个工具在高真空中加速并聚焦一束镓离子到直径几纳米的点上，产生两种一般效果：离子从样品中溅射出材料，在三维上蚀刻出受控的图案，形成许多不同的材料；离子与样品的相互作用引起二次电子和x射线的发射，使材料的表征成为可能。通过向腔室中加入特定气体，材料可以随光束沉积，或加速蚀刻。FIB是目前唯一能够在多种材料中制造纳米尺度三维结构的工具，在许多不同的学科中具有巨大的潜力。目前，大多数FIB应用涉及集成电路“手术”和透射电子显微镜的样品制备。在finics公司（一家专门为工业提供FIB服务的加拿大公司）的技术和培训支持下，提交此提案的团队将推动真正的创新工作：使用FIB探索微小晶体结构的机械特性；用新制造的纳米级器件测试测量极限；集成微纳米级器件；并评估纳米纤维的三维结构，以更好地了解固/液界面。在拟议的团队的监督下探索这些不同的问题，将使许多研究生在尖端技术方面得到全面的培训，为他们在政府和私营部门的高级研究和就业做好准备。

Researchers at Queen's University propose to purchase a focused ion beam tool (FIB) to be installed and operated in Kingston, Ontario.  This tool accelerates and focuses a beam of gallium ions in high vacuum onto a spot a few nanometers in diameter, with two general effects:  the ions sputter away material from the sample, etching controlled patterns in three dimensions into many different materials; and  the ion interaction with the sample causes emission of secondary electrons and x-rays, enabling characterization of the material.  By adding specific gases to the chamber, material can be deposited with the beam, or etching accelerated. The FIB is the only tool that can fabricate three-dimensional structures at the few nanometer scale in a variety of materials, and holds great potential in a number of different disciplines. Currently most FIB applications involve integrated circuit "surgery" and sample preparation for transmission electron microscopy. In conjunction with technical and training support from Fibics Inc., a Canadian company specializing in FIB services for industry, the team submitting this proposal will push into truly innovative work: using the FIB to explore the mechanical properties of tiny crystalline structures; test the limits of measurement with newly fabricated nanoscale devices; integrate micro and nanoscale devices; and evaluate the 3D structure of nano-fibers to better understand solid/liquid interfaces. Exploring such diverse questions under the supervision of the proposed team will enable numerous graduate students full training in cutting edge technology, preparing them for advanced research and employment in the government and private sectors.